The XMS-V family achieves ultra precision vertical motion by adding a counterbalance mechanism to the proven XMS design. Of all of the vertical stages, the XMS-V has the best MIM and bi-directional repeatability and highest speed.
Ultra-high performance vertical stage with superior accuracy, repeatability and MIM
Non-contact, direct-drive system with counterbalance for ultra-precision, high dynamic motion and reliable operation
Extra-large, ironless, high-efficiency linear motor minimizes heat generation
Optical, at center of travel, including mechanical zero signal
Optical, at center of travel, including mechanical zero signal
Cable Length
5 m
5 m
Compliance in Pitch
2.5 µrad/Nm
2.5 µrad/Nm
Compliance in Roll
2.0 µrad/Nm
2.0 µrad/Nm
Compliance in Yaw
3.5 µrad/Nm
3.5 µrad/Nm
Straightness, Flatness
± 0.75 µm
± 0.75 µm
Weight
3.5 kg
3.5 kg
MTBF
20,000 h
20,000 h
Showing 1 to 15 of 15 entries
Features
Ultra-Performance Motorized Stage Technology
Newport's XM Series of linear motor stages delivers world-leading dynamic performance. The XMS100V vertical stage is comprised of a standard XMS100 linear stage mounted on a high flatness vertical plate and a low friction air cylinder connected to the carriage. The result is a vertical stage that offers both ultra-high precision and long travel for applications such as focusing, sensor test and calibration, direct laser lithography, fiber alignment, ultra-precision assembly, and more. The video demostrates an XYZ motion system constructed of XM linear and vertical stages.
Counterbalance Options
The direct drive motor, aided by counterbalancing the load, negates the effect of gravity, alleviating work from the motor and gaining all of the benefits of a linear motor. The pneumatic counterbalance option is adjustable for different loads. The magnetic counterbalance option prevents the carriage from drifting down, even when the power to the motor is cut.
Magnetic counterbalance
Anti-Creep Crossed Roller Bearings
Compared to wedge designs, the direct vertical guide, composed of matched pairs of anti-creep crossed roller bearings, leads to outstanding ripple-free motion required in high-sensitivity operations while preventing cage migration.
High Accuracy Linear Encoder
Precision position feedback is supplied by a high accuracy, glass, linear encoder, allowing for outstanding MIM of 50 nm. The precision alignment and mounting of this low thermal expansion scale minimizes the impact of temperature changes on stage repeatability and accuracy.
T-shaped Carriage
The T-shaped carriage used on the XMS-V is optimized for stiffness and makes it more tolerant to cantilevered loads when compared to stages with a C-shaped carriage design. The improved stiffness is a requirement for maintaining the stage preload.
High Precision and Smooth Motion
The ironless direct drive technology allows highly dynamic motion with essentially no backlash, hysteresis, wind-up or stiction which leads to consistently lower and more repeatable run-out. In addition, the absence of drive screws, leads to outstanding ripple-free motion required in high precision positioning
Extending the Capabilities of Vertical Stages
Only the XMS-V reaches new heights in vertical stage performance via higher precision and improved dynamic motion. Due to its enhanced performance, it addresses a broader base of challenging applications.
XMS-V Load Diagram
Metrology Report Included at No Additional Cost
Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.
Compatible motion controllers for these XM series linear motor/direct drive driven stages are:
In order to provide better service and products, please provide the following brief information.
Password Reset
Enter your email address below to reset your account password.
Password Reset
Email Verification Required
Cart Items Updated
Remove Product
Remove this product from your comparison list?
Check Order Status
Provide an order number and postal code to check the status of an order or download an invoice for an order that has shipped. Login to view your complete order history.
Sign In Required
To access this and other valuable technical resources, please sign in or register for a new online account.
Over 8,000 products in-stock! & FREE 2-Day shipping on all web orders!* Learn More FREE T-Shirt with orders $250+ Details
Ultra-High Velocity 