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Wafer Positioning Stage, Integrated Vertical and DC Rotation Stage
Wafer Positioning Stage, Integrated Vertical and Stepper Rotation Stage

Specifications

Features

Payload Design

The ZVR rigidly supports and drives the payload at three points (separated by 120 degrees) along the outer circumference of the stage. Ordinary designs use a single cam, wedge, or screw located at the center of the stage. Newport’s three point design with an inline guide and drive, has advantages for applications that have slight to extreme unbalanced loading such as wafer probing, which can have vertical forces applied at locations along the outer edges of the chuck. Angular deflections due to these off-center loads are minimized and binding during vertical motion is eliminated.

Open Aperture

An important feature of the ZVR's unique design includes a 50mm clear aperture through the center of the rotation stage to allow for cables, lines and other utilities.

Adjustable Limit Switch

The ZVR features an upper limit switch with a 4 mm adjustment range enabling the user to set the upper limit of vertical travel.

Rotational and vertical positioning

Newport’s ZVR-PP and ZVR-PC are integrated Z-vertical and Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks.

Metrology Report Included at No Additional Cost

Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.