1. Products
  2. Motion Control
  3. Rotation and Tilt Stages
  4. Motorized Rotation Stages
  5. DC Motor Rotation Stages
  6. ZVR Integrated Vertical and Rotation Stages
  7. ZVR-PC

Wafer Positioning Stage, Integrated Vertical and DC Rotation Stage

  • Travel Range
    10 mm
  • Angular Range
    360°
  • Maximum Speed
    80°/s
  • Maximum Linear Speed
    10 mm/s  
  • Minimum Incremental Motion
    2.0 mdeg
  • Minimum Incremental Motion, Linear
    0.05 µm  
  • Maximum Torque
    1 Nm
  • Centered Load Capacity
    100 N
  • Uni-directional Repeatability, Typical
    ±0.50 mdeg, ±0.2 µm (linear)
  • Uni-directional Repeatability, Guaranteed
    ±1.5 mdeg, ±1.0 µm (linear)
  • Bi-directional Repeatability, Typical
    ±1.3 mdeg
  • Bi-directional Repeatability, Guaranteed
    ±3.0 mdeg
  • Bi-directional Repeatability, Linear
    ±1.2 (typical) ±2.0 (guaranteed) µm
  • Accuracy, Typical
    Rotary: ±10 mdeg - Linear: ±0.5 µm
  • Accuracy, Guaranteed
    Rotary: ±15 mdeg - Linear: ±2.0 µm
  • Wobble, Typical
    ±22 µrad
  • Wobble, Guaranteed
    ±40 µrad
  • Eccentricity, Typical
    ±2.2 µm
  • Eccentricity, Guaranteed
    ±4.0 µm
  • Origin Repeatability
    Rotary: ±7.5 mdeg
    Linear: ±2.5 µm
  • MTBF
    20,000 h (25% load, 10% duty cycle)
  • Cable Length
    3 m  
  • Aperture Diameter
    50 mm
  • Thread Type
    M4
  • Weight
    4.2 kg
  • Compliance
    RoHS 3, CE
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