Integrated Vertical and Rotation Stage for Wafer Positioning

The ZVR stage integrates 10 mm of vertical (Z-axis) and 360° of continuous rotary (ϴ-axis) positioning with a unique low profile three-point drive and bearing design. It is designed primarily to precisely elevate and rotate 200- and/or 300-mm wafer chucks and other samples or objects requiring adjustments to align the object's orientation or to focus.

Three-point bottom interface for stable mounting to any XY stage or other platform
Large center aperture simplifies vacuum and electrical cable management
Low mass and a high natural frequency enable rapid step-and-settle applications
Stainless steel recirculating ball bearings
Plug and Play - ESP compatible
DC motor and ultra-high-resolution encoder for high speed and reliability

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Compatibility:

	Compare	Description	Compatibility	Drawings, CAD & Specs	Angular Range	Minimum Incremental Motion	Maximum Speed	Centered Load Capacity	Avail.	Price
		ZVR-PCWafer Positioning Stage, Integrated Vertical and DC Rotation Stage	METRIC		360°	2.0 mdeg	80°/s	100 N	Contact Us

Notes:

Stepper Motor for ϴ-axis version is also available.

COMPATIBLE CONTROLLERS

Compatible motion controllers for ZVR-PC are:

XPS-RLD Motion Controller ( or Axis): Requires an Driver Module.
XPS-D Motion Controller (, , or Axis): Requires an Driver Module.
ESP302 Motion Controller (, , or Axis): Plug and Play compatible with ESP302 Motion Controller.
SMC100 Motion Controller: for ϴ-axis and * for Z-axis.

* Minimum Incremental Motion for Z-axis is 0.25 µm with SMC100PP controller.

Features

Payload Design

The ZVR rigidly supports and drives the payload at three points (separated by 120 degrees) along the outer circumference of the stage. Ordinary designs use a single cam, wedge, or screw located at the center of the stage. Newport’s three point design with an inline guide and drive, has advantages for applications that have slight to extreme unbalanced loading such as wafer probing, which can have vertical forces applied at locations along the outer edges of the chuck. Angular deflections due to these off-center loads are minimized and binding during vertical motion is eliminated.

Open Aperture

An important feature of the ZVR's unique design includes a 50mm clear aperture through the center of the rotation stage to allow for cables, lines and other utilities.

DC Motor with Ultra-High Resolution Feedback for Rotation

Vertical motion is achieved with an open-loop stepper motor, and rotary motion is provided by a closed-loop DC motor with an ultra-high resolution 8,000 cts/rev rotary encoder. The rotary DC motor version of this stage is the recommended choice for applications requiring higher rotary speed and repeatability.

Adjustable Limit Switch and Origin Reference

The ZVR Series features an upper limit switch with a 4-mm adjustment range enabling the user to set the upper limit of travel. These stages are also equipped with a hardware origin that serves as an absolute reference (home) position.

Metrology Report Included at No Additional Cost

Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.

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