Motorized Vertical Stage, Ultra-Precision Linear Motor, 100 mm, 100 N

Technical Specs

  • Travel Range
    100 mm  
  • Minimum Incremental Motion
    0.05 µm
  • Maximum Speed
    300 mm/s
  • Centered Load Capacity
    100 N
  • Accuracy, Guaranteed
    ± 0.75 µm
  • Bi-directional Repeatability, Guaranteed
    ± 0.05 µm
  • Limit Switches
    Optical, fiducial on encoder
  • Origin
    Optical, at center of travel, including mechanical zero signal
  • Cable Length
    5 m  
  • Compliance in Pitch
    2.5 µrad/Nm  
  • Compliance in Roll
    2.0 µrad/Nm  
  • Compliance in Yaw
    3.5 µrad/Nm
  • Straightness, Flatness
    ± 0.75 µm
  • Weight
    3.5 kg
  • MTBF
    20,000 h