XMS100V Motorized Vertical Stage

The XMS100V stage is comprised of a standard XMS100 stage mounted on a high flatness (surface flatness within 5 µm) vertical plate or a bracket and a low friction air cylinder connected to the carriage. The custom-designed connection of the air cylinder to the carriage eliminates the effect of the air cylinder’s motion on the performance of the XMS100 stage. With the proper adjustment of pressure, a perfect balance of the load can be achieved. When motor power is turned off, the air cylinder’s valve will enable a controlled descent of the carriage. Also available with a more compact, but load-specific, magnetic counterweight.

Contact Inside Sales Support team to discuss application requirements and get a quote for the solution that best suits your needs.

Specifications

Technical Specs

Travel Range

100 mm
Minimum Incremental Motion

0.05 µm
Maximum Speed

300 mm/s
Centered Load Capacity

100 N
Accuracy, Guaranteed

± 0.75 µm
Bi-directional Repeatability, Guaranteed

± 0.05 µm
Limit Switches

Optical, fiducial on encoder
Origin

Optical, at center of travel, including mechanical zero signal
Compliance in Pitch

2.5 µrad/Nm

Compliance in Roll

2.0 µrad/Nm
Compliance in Yaw

3.5 µrad/Nm
Straightness, Flatness

± 0.75 µm
Cable Length

5 m
Weight

3.5 kg
MTBF

20,000 h
Compliance

RoHS 3, CE

Travel Range

100 mm
Minimum Incremental Motion

0.05 µm
Maximum Speed

300 mm/s
Centered Load Capacity

100 N
Accuracy, Guaranteed

± 0.75 µm
Bi-directional Repeatability, Guaranteed

± 0.05 µm
Limit Switches

Optical, fiducial on encoder
Origin

Optical, at center of travel, including mechanical zero signal
Compliance in Pitch

2.5 µrad/Nm

Compliance in Roll

2.0 µrad/Nm
Compliance in Yaw

3.5 µrad/Nm
Straightness, Flatness

± 0.75 µm
Cable Length

5 m
Weight

3.5 kg
MTBF

20,000 h
Compliance

RoHS 3, CE

Resources & Downloads

Application Notes

XMS100V Vertical Linear Stage (1.4 MB, PDF)
Surface Metrology.pdf (134.1 kB, PDF)

Literature

Technical Notes

Methods to Determine Optimized Scaling Acceleration (3.4 MB, PDF)

2D / 3D CAD Software

Download CAD Files

Drawings And Cad

XMS100V-S (107.6 kB, PDF)

Manuals

Cable Kits User's Manual.pdf (1.9 MB, PDF)

Related Products

Compatible controllers

Based on axis required, choose a specific XPS-D or XPS-RLD controller to pair with the stage.
Along with the controller, a driver module and a cable kit are required. See the options below.

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver	UNIVERSAL				Learn More
		XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver	UNIVERSAL				Learn More

Universal XPS-DRV11 driver

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		XPS-DRV11 Motion Controller Card, Universal, Stepper, DC, and Linear Motors	UNIVERSAL		In Stock	$856
		XPS-DK22 Cable Kit, For Stages IMS-LM-S, XM-S, and XPS-DRV11 Driver	UNIVERSAL		In Stock	$483

Legacy XPS-DRV02 driver

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		XPS-DRV02 PWM Drive Module, Brushless Motors	UNIVERSAL		In Stock	$1,326
		XPS-DK27 Cable Kit, For Stages IMS-LM-S, XM-S, and XPS-DRV02 Driver	UNIVERSAL		Contact Us	$432

Similar Stages

Description	Compatibility	Avail.	Price
IMS100V Motorized Vertical Stage, 100 mm Travel, 400 N Load, DC motor, 1/4-20	IMPERIAL	7 Weeks	$12,072
VP-5ZA Motorized Vertical Stage, Compact, 4.8 mm, DC Servo with Tachometer, 4-40 and 8-32	IMPERIAL	Show	$10,370
GTS30V Motorized Vertical Stage, High Precision, 30 mm Travel, GTS Series	UNIVERSAL	4 Weeks	$10,702

Motorized Vertical Stage, Ultra-Precision Linear Motor, 100 mm, 100 N