Compare Model Drawings, CAD & Specs Availability Price
Piezo Linear Stage, 200 µm Nano-Positioning, Open-loop
$1,775
In Stock
In Stock
Piezo Linear Stage, 200 µm Nano-Positioning, Open-loop, XPS
$1,757
Nanopositioning Stage, 200 µm, Strain-gauge
$2,868
In Stock
In Stock
Nanopositioning Stage, 200 μm, Strain-gauge, XPS
$2,981
Piezo Linear Stage, 400 µm Nano-Positioning, Open-loop
$2,223
In Stock
In Stock
Piezo Linear Stage, 400 µm Nano-Positioning, Open-loop, XPS
$2,223
In Stock
In Stock
Nanopositioning Stage, 400 µm, Strain-gauge
$3,578
In Stock
In Stock
Nanopositioning Stage, 400 μm, Strain-gauge, XPS
$3,578
In Stock
In Stock
Piezo XY Linear Stage, Open-loop, 100 µm Nanopositioning
$3,407
In Stock
In Stock
Piezo XY Linear Stage, Open-loop, 100 µm Nanopositioning, XPS
$3,407
Piezo XY Linear Stage, 100 µm Nanopositioning, Strain-gauge
$4,146
Piezo XY Linear Stage, 100 µm Nanopositioning, Strain-gauge, XPS
$4,146
In Stock
In Stock
Piezo XY Linear Stage, Open-loop, 200 µm Nanopositioning
$4,315
In Stock
In Stock
Piezo XY Linear Stage, 200 µm Nanopositioning, XPS
$4,272
Piezo XY Linear Stage, 200 µm Nanopositioning, Strain-gauge
$5,298
In Stock
In Stock
Piezo XY Linear Stage, 200 µm Nanopositioning, Strain-gauge, XPS
$5,298
In Stock
In Stock
XYZ Piezo Linear Stage, Open-loop, 100 µm Nanopositioning
$2,578
In Stock
In Stock
XYZ Piezo Linear Stage, Open-loop, 100 µm Nanopositioning, XPS
$2,459
In Stock
In Stock
Piezo XYZ Linear Stage, 100 µm Nanopositioning, Strain-gauge
$4,480
In Stock
In Stock
Piezo XYZ Linear Stage, 100 µm Nanopositioning, Strain-gauge, XPS
$3,825
In Stock
In Stock

Specifications

Features

Sub-Nanometer Positioning Resolution

With positioning resolution as low as 0.2 nm, the NPX Piezo Stack linear stage make ultra-fine adjustments with resolution only limited by the noise of the control electronics.

Large Piezoelectric Travel Range

NPX Piezo Stack linear stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion and up to 400 µm travel range. Due to the frictionless guide principle, NPX Piezo Stack linear stages are maintenance-free and are not subject to wear. Furthermore, the output motion sensitivity is not affected by mechanical friction.

Optional Integrated Strain-Gauge for Closed-Loop Operation

The closed-loop systems (-SG models) feature high resolution strain-gauge position sensors for highly accurate and repeatable motion which also compensates for actuator creep. The assembly is done as a full Wheatstone bridge and is temperature insensitive. The closed-loop devices can be used in either open or closed-loop control.

Vacuum Versions Available

The NPX Piezo Stack linear stages are available in vacuum compatible versions which can be used in vacuum (10-6 Torr) environments.

Motion in X, XY, or XYZ

NPX Piezo Stack linear stages are available as X, XY, and XYZ motion systems. The multi-axis XY and XYZ devices utilize an advanced parallel motion principle, meaning all actuators act directly on the moving platform. Smaller form factor and lower inertia for faster motion can be achieved as opposed to other piezo systems with serial kinematics such as stacks of individual stages.