Compare Model Drawings, CAD & Specs Travel Range Axes of Travel Feedback Availability Price
Piezo Linear Stage, 200 µm Nano-Positioning, Open-loop
$1,690
In Stock
0.2 mm X Open-loop
In Stock
Piezo Linear Stage, 200 µm Nano-Positioning, Open-loop, XPS
$1,673
0.2 mm X Open-loop
Nanopositioning Stage, 200 µm, Strain-gauge
$2,731
In Stock
0.2 mm X Strain-gauge
In Stock
Nanopositioning Stage, 200 μm, Strain-gauge, XPS
$2,839
1 Week
0.2 mm X Strain-gauge
1 Week
Piezo Linear Stage, 400 µm Nano-Positioning, Open-loop
$2,117
In Stock
0.4 mm X Open-loop
In Stock
Piezo Linear Stage, 400 µm Nano-Positioning, Open-loop, XPS
$2,117
In Stock
0.4 mm X Open-loop
In Stock
Nanopositioning Stage, 400 µm, Strain-gauge
$3,407
In Stock
0.4 mm X Strain-gauge
In Stock
Nanopositioning Stage, 400 μm, Strain-gauge, XPS
$3,407
In Stock
0.4 mm X Strain-gauge
In Stock
Piezo XY Linear Stage, Open-loop, 100 µm Nanopositioning
$3,244
In Stock
0.1 mm XY Open-loop
In Stock
Piezo XY Linear Stage, Open-loop, 100 µm Nanopositioning, XPS
$3,244
0.1 mm XY Open-loop
Piezo XY Linear Stage, 100 µm Nanopositioning, Strain-gauge
$3,948
In Stock
0.1 mm XY Strain-gauge
In Stock
Piezo XY Linear Stage, 100 µm Nanopositioning, Strain-gauge, XPS
$3,948
In Stock
0.1 mm XY Strain-gauge
In Stock
Piezo XY Linear Stage, Open-loop, 200 µm Nanopositioning
$4,109
In Stock
0.2 mm XY Open-loop
In Stock
Piezo XY Linear Stage, 200 µm Nanopositioning, XPS
$4,068
0.2 mm XY Open-loop
Piezo XY Linear Stage, 200 µm Nanopositioning, Strain-gauge
$5,045
In Stock
0.2 mm XY Strain-gauge
In Stock
Piezo XY Linear Stage, 200 µm Nanopositioning, Strain-gauge, XPS
$5,045
In Stock
0.2 mm XY Strain-gauge
In Stock
XYZ Piezo Linear Stage, Open-loop, 100 µm Nanopositioning
$2,455
In Stock
0.1 mm XYZ Open-loop
In Stock
XYZ Piezo Linear Stage, Open-loop, 100 µm Nanopositioning, XPS
$2,341
0.1 mm XYZ Open-loop
Piezo XYZ Linear Stage, 100 µm Nanopositioning, Strain-gauge
$4,266
In Stock
0.1 mm XYZ Strain-gauge
In Stock
Piezo XYZ Linear Stage, 100 µm Nanopositioning, Strain-gauge, XPS
$3,642
In Stock
0.1 mm XYZ Strain-gauge
In Stock

Specifications

Features

Sub-Nanometer Positioning Resolution

With positioning resolution as low as 0.2 nm, the NPX Piezo Stack linear stage make ultra-fine adjustments with resolution only limited by the noise of the control electronics.

Large Piezoelectric Travel Range

NPX Piezo Stack linear stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion and up to 400 µm travel range. Due to the frictionless guide principle, NPX Piezo Stack linear stages are maintenance-free and are not subject to wear. Furthermore, the output motion sensitivity is not affected by mechanical friction.

Optional Integrated Strain-Gauge for Closed-Loop Operation

The closed-loop systems (model numbers ending in SG) feature high resolution strain-gauge position sensors for highly accurate and repeatable motion which also compensates for actuator creep. The assembly is done as a full Wheatstone bridge and is temperature insensitive. The closed-loop devices can be used in either open or closed-loop control.

Vacuum Versions Available

The NPX Piezo Stack linear stages are available in vacuum compatible versions which can be used in vacuum (10-6 Torr) environments.

Motion in X, XY, or XYZ

NPX Piezo Stack linear stages are available as X, XY, and XYZ motion systems. The multi-axis XY and XYZ devices utilize an advanced parallel motion principle, meaning all actuators act directly on the moving platform. Smaller form factor and lower inertia for faster motion can be achieved as opposed to other piezo systems with serial kinematics such as stacks of individual stages.