Piezo XYZ Linear Stage, 100 µm Nanopositioning, Strain-gauge, XPS

Technical Specs

  • Axes of Travel
    XYZ
  • Travel Range
    0.1 mm  
  • Axial Load Capacity
    40/40/32 N
  • Axial Stiffness
    1 N/µm
  • Vertical Load Capacity
    30 N  
  • Feedback
    Strain-gauge
  • Cable Length
    1.2 m
  • Capacitance
    1.8 µF  
  • Closed Loop Repeatability, Typical
    30 nm  
  • Closed Loop Resolution
    4 nm  
  • Closed Loop Travel
    80 µm  
  • Open Loop Resolution
    0.4 nm  
  • Open Loop Travel
    100 µm  
  • Resonant Frequency, 105g Load
    190/180/250 Hz
  • Resonant Frequency, 300g Load
    110/110/150 Hz
  • Resonant Frequency, 80g Load
    210/200/300 Hz
  • Resonant Frequency, Unloaded
    500/550/480 Hz
  • RoHS
    Compliant
  • Weight
    165 g