XYZ Linear Stage, Vacuum Open-loop Piezo Stack, 100 μm

The NPXYZ100V6 Vacuum Compatible Three Axis Nanopositioning Linear Stage is a 100 um travel piezo-based stage providing nanometer resolution motion in XYZ. It is ideally suited for nanopositioning of small components such as mirrors, fibers, laser diodes, micro-optics, sensors, or cellular samples. Applications include optical delay lines, path length changes of interferometers, laser lithography, scanning microscopy, and patch-clamping, among others. NPX stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer (PZT) stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion. Due to the frictionless guide principle, NPX stages are maintenance-free and are not subject to wear. One advantage is the rapid response and fast settling performance. This allows them to be used in dynamic processes such as high-frequency error compensation, tracking, fast stepping or continuous scanning. In this open-loop version, the resolution is only limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezoelectric ceramic material. Fastening is easy with a number of threads and alignment pin holes at the top and bottom plates. For mounting to optical tables or other components with the same hole grid, use adapter plate NPX-BP. Like with all piezo flexure devices, excessive moment loads and side forces acting between the top plate and the housing should be avoided during fastening.
Use with the NPC3 Nanopositioning Amplifier.