XY Piezo Linear Stage, 100 µm Nano-Positioning, Strain-gauge, Vacuum

Technical Specs

  • Axes of Travel
    XY
  • Travel Range
    0.1 mm  
  • Axial Load Capacity
    110/95 N
  • Axial Stiffness
    1.1 N/µm / 0.95 N/µm
  • Vertical Load Capacity
    75 N  
  • Feedback
    Strain-gauge
  • Cable Length
    2 m
  • Vacuum Compatibility
    10-6 hPa
  • Capacitance
    1.8 µF  
  • Closed Loop Repeatability, Typical
    36 nm  
  • Closed Loop Resolution
    4 nm  
  • Closed Loop Travel
    80 µm  
  • Open Loop Resolution
    0.4 nm  
  • Open Loop Travel
    100 µm  
  • Resonant Frequency, Unloaded
    380/480 Hz
  • RoHS
    Compliant
  • Weight
    175 g