The ONE-XY uniquely integrates both the X and Y axes in a low-profile design with excellent positioning accuracy, flatness, straightness, stiffness, MIM, and repeatability.
Integrated XY stages with built-in orthogonality
Excellent planarity with micron-level straightness and flatness
Low profile three plate design reduces stacking errors and increases stiffness
High efficiency, non-cogging linear motor
Linear encoder for nano-scale MIM and repeatability
Also available in a high accuracy (HA) version. Specifications measured on stage centerline, 50 mm above mounting surface. Newport provides NIST traceable, test results.
Guaranteed accuracy varies for the ONE-XY-HA versions.
Orthogonality is reduced to 5 µrad for the ONE-XY-HA versions.
Features
Increased Stiffness
For better stability, the wide separation of cross-roller bearings and a thick middle plate ensures higher stiffness against cantilevered loads.
Micron-level Straightness and Flatness
Because of the ONE-XY's precision grinding and cross-roller bearings, it achieves micron-level straightness and flatness.
Ironless Linear Motor
The high efficiency, ironless linear motor has the advantage of higher speed, acceleration and system responsiveness without wear to motor brushes or drive screws, significantly reducing heat generation. Additionally the non-cogging feature of the Ironless Linear Motor ensures excellent speed stability. Not only does the ironless motor provide these advantages, it also results in high-throughput and high reliability.
Integrated X and Y Axes
The ONE-XY's most distinguishing feature is its 3 plate design, allowing movement in both X and Y direction with a low profile relative to stacked stages. Orthogonality is built into the design, therefore enhancing the XY accuracy.
Compatible motion controllers for these linear motor driven stages are:
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