Motorized XY Linear Stage, Linear Motor, 90 mm Travel

Technical Specs

  • Motorized Axes
    XY
  • Travel Range
    90 mm
  • Maximum Speed
    200 mm/s
  • Minimum Incremental Motion
    50 nm
  • Maximum Acceleration
    0.3 G
  • Continuous Motor Force
    10 N
  • Peak Motor Force
    21 N
  • Centered Load Capacity
    120 N
  • Accuracy, Typical
    ±0.5 µm
  • Accuracy, Guaranteed
    ±2.0 µm
  • Bi-directional Repeatability, Typical
    ±0.040 µm
  • Bi-directional Repeatability, Guaranteed
    ±0.080 µm
  • Flatness, Typical
    ±1.0 µm
  • Straightness, Typical
    ±1.0 µm
  • Pitch, Typical
    ±20 µrad
  • Pitch, Guaranteed
    ±65 µrad
  • Yaw, Typical
    ±25 µrad
  • Yaw, Guaranteed
    ±65 µrad
  • Roll, Typical
    ±29 µrad
  • Orthogonality
    96 µrad
  • Origin Repeatability
    ±0.1 µm
  • Cable Length
    3 m
  • Width
    184 mm
  • Weight
    5.8 kg
  • MTBF
    20,000 h (25% load, 30% duty cycle)
  • RoHS
    Compliant
  • Compatible XPS-RL Driver Module