The Agilis™ Piezo Motor linear stages are high precision miniature stages featuring Newport’s proprietary Agilis piezo motor. With ultra-high adjustment sensitivity, convenient programmable operation, and compact design, Agilis stages provide outstanding motion performance at the cost of a high quality manual stage.
Small minimum incremental motion
Set-and-forget stability when not in use
Ripple-free with low friction travel
Available with direct read encoder and CONEX controller
, 90 degree angle bracket for building XZ and XYZ stage configurations. Attention this bracket is not compatible with the AG-LS25-27 (as Z-axis). For XY stage assemblies of AG-LS25 stages, use the 4 x TC M3x4 screws supplied with each stage. The AG-LS25-27 & AG-LS25-27V6 must be positioned at the bottom of the stack (X-axis). The AG-LS25 & AG-LS25V6 stages can be stacked on top of the AG-LS25-27(V6) as the Y-axis, or as the Z-axis using the 339233, 90 degree angle bracket. Please note that the 339233, 90 degree angle bracket, is anodized and not vacuum compatible. An XZ stage stack is shown.
Integrated Linear Encoder with CONEX Controller Version
Newport also offers a version of the 27-mm travel Agilis linear stage with a built-in direct read linear encoder and integrated CONEX controller, the CONEX-AG-LS25-27P
. Its closed-loop control provides a typical bi-directional repeatability of 0.2 µm and 0.2 µm minimum incremental motion.
50 nm Minimum Incremental Motion
The Agilis proprietary piezo technology provides 50 nm incremental motion capability, making them ideal for ultra-sensitive alignments and adjustments.
Vacuum Compatible Versions
The Agilis linear stages are available in vacuum compatible versions which can be used in vacuum (10-6 Torr) environments.
Set-and-Forget Long-Term Stability
The Agilis piezo motor is directly coupled to the moving carriage with no intermediate screw or gear, avoiding problems with coupling in drivetrain. When idle, the holding force of the motor locks the position for true set-and-forget long-term stability.
Ripple-Free and Low Friction Travel
The thermally matched stainless steel design and precision manufactured bearing surfaces of the Agilis linear stage provide ripple-free, low friction linear travel and angular deviations better than 100 µrad in any axis.
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