Piezo Linear Stage, 12 mm travel, Vacuum Compatible

The Agilis linear stages are available in vacuum compatible versions which can be used in vacuum (10^-6 Torr) environments.

Agilis™ piezo motor linear stages can be configured as XY, XZ, or XYZ stage stacks. You can use the 339233, 90 degree angle bracket for building XZ and XYZ stage configurations. Attention this bracket is not compatible with the AG-LS25-27 (as Z-axis).  For XY stage assemblies of AG-LS25 stages, use the 4 x TC M3x4 screws supplied with each stage. The AG-LS25-27 & AG-LS25-27V6 must be positioned at the bottom of the stack (X-axis). The AG-LS25 & AG-LS25V6 stages can be stacked on top of the AG-LS25-27(V6) as the Y-axis, or as the Z-axis using the 339233, 90 degree angle bracket. Please note that the 339233, 90 degree angle bracket, is anodized and not vacuum compatible. An XZ stage stack is shown.

The Agilis proprietary piezo technology provides 50 nm incremental motion capability, making them ideal for ultra-sensitive alignments and adjustments.

The Agilis piezo motor is directly coupled to the moving carriage with no intermediate screw or gear, avoiding problems with coupling in drivetrain. When idle, the holding force of the motor locks the position for true set-and-forget long-term stability.

The thermally matched stainless steel design and precision manufactured bearing surfaces of the Agilis linear stage provide ripple-free, low friction linear travel and angular deviations better than 100 µrad in any axis.