Piezo Linear Stage, 12 mm travel, Vacuum Compatible

The AG-LS25V6 is the vacuum compatible version of the AG-LS25 piezo motor driven linear stage and is rated for 10-6 Torr. The AG-LS25V6 features 12 mm travel and precision motion is achieved by calibrated, pre-stressed linear ball bearings. The thermally matched stainless steel design and precision manufactured bearing surfaces provide ripple-free, low friction linear travel and angular deviations better than 200 µrad in any axis.
Use with either the Agilis™ AG-UC2 handheld, AG-UC8 or AG-UC8PC controllers.
Note: The connector supplied with the stage is not vacuum compatible due to various feed-through configurations and customer preferences. Please contact Newport for vacuum compatible connector options.
Multi-Axis Stage Configurations
Agilis™ piezo motor linear stages can be configured as XY, XZ, or XYZ stage stacks. You can use the
50 nm Minimum Incremental Motion
The Agilis proprietary piezo technology provides 50 nm incremental motion capability, making them ideal for ultra-sensitive alignments and adjustments.
Vacuum Compatible Versions
The Agilis linear stages are available in vacuum compatible versions which can be used in vacuum (10-6 Torr) environments.
Set-and-Forget Long-Term Stability
The Agilis piezo motor is directly coupled to the moving carriage with no intermediate screw or gear, avoiding problems with coupling in drivetrain. When idle, the holding force of the motor locks the position for true set-and-forget long-term stability.
Ripple-Free and Low Friction Travel
The thermally matched stainless steel design and precision manufactured bearing surfaces of the Agilis linear stage provide ripple-free, low friction linear travel and angular deviations better than 100 µrad in any axis.
Specifications
- Travel Range12 mm
- Axes of TravelX
- Maximum Speed0.5 mm/s
- Minimum Incremental Motion50 nm
- Centered Load Capacity3 N
- Vertical Load Capacity2 N
- Holding Force4 N
- BearingsBall Bearings
- MaterialStainless Steel
- Cable Length1.2 m
- Vacuum Compatibility10-6 Torr
- Limit SwitchesProprietary electrical switches
- Pitch±100 µrad
- Yaw±100 µrad
- Weight70 g
- Operating Temperature10 to 35°C
Resources & Downloads
3D Product Models
Literature
Agilis™ Series Piezo Motor Driven Positioners(1.7 MB, PDF) Vaccum Compatible Products Brochure(3.8 MB, PDF)
2D Product Drawings
AG-LS25-S(204.4 kB, PDF)
Manuals
Agilis Piezo Motor Driven Components User Manual(2.6 MB, PDF)
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