Motorized Linear Stage, Miniature, 25 mm Travel, DC Motor, Vacuum Compatible

Technical Specs

  • Travel Range
    25 mm
  • Maximum Speed
    1.25 mm/s
  • Minimum Incremental Motion
    100 nm
  • Centered Load Capacity
    25 N
  • Axial Load Capacity (+Cx)
    5 N
  • Inverse Axial Load Capacity (-Cx)
    -5 N
  • Accuracy, Typical
    ±1.0 µm
  • Accuracy, Guaranteed
    ±3.0 µm
  • Uni-directional Repeatability, Typical
    ±0.08 µm
  • Uni-directional Repeatability, Guaranteed
    ±0.15 µm
  • Bi-directional Repeatability, Typical
    ±0.2 µm
  • Bi-directional Repeatability, Guaranteed
    ±1.0 µm
  • Pitch, Typical
    ±25 µrad
  • Pitch, Guaranteed
    ±100 µrad
  • Compliance in Pitch
    80 µrad/Nm  
  • Yaw, Typical
    ±30 µrad
  • Yaw, Guaranteed
    ±50 µrad
  • Compliance in Yaw
    80 µrad/Nm
  • Compliance in Roll
    60 µrad/Nm  
  • Material
    Steel
  • Bearings
    Double-Row Ball Bearings
  • Drive Type
    DC Motor
  • Origin Repeatability
    ±2.5 µm
  • Cable Length
    1.5 m  
  • Connector Type
    DB25 Male
  • Vacuum Compatibility
    10-6 hPa
  • Thread Type
    M2 and M3
  • Weight
    0.73 kg
  • MTBF
    10,000 h (25% load, 30% Duty cycle)
  • RoHS
    Compliant
  • Maximum Power Consumption
    10 W
  • Compatible XPS-RL Driver Module
  • Compatible XPS-D Driver Module
  • ESP301 Compatibility
    Yes
  • SMC100 Compatibility