Compare Model Drawings, CAD & Specs Availability Price
Motorized Linear Stage, 50 mm Travel, DC Motor, Rotary Encoder, 1/4-20
$4,095
Motorized Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, 1/4-20
$6,705
Motorized Linear Stage, 100 mm Travel, DC Motor, Rotary Encoder, 1/4-20
$4,400
Motorized Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, 1/4-20
$6,995
high performance ils series motorized linear stage
Motorized Linear Stage, 150 mm Travel, DC Motor, Rotary Encoder, 1/4-20
$4,805
In Stock
In Stock
high performance ils series motorized linear stage
Motorized Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, 1/4-20
$7,535
Motorized Linear Stage, 200 mm Travel, DC Motor, Rotary Encoder, 1/4-20
$5,295
Motorized Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, 1/4-20
$8,150
Motorized Linear Stage, 250 mm Travel, DC Motor, Rotary Encoder, 1/4-20
$5,945
Motorized Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, 1/4-20
$8,775
Motorized Linear Stage, High Performance, 50 mm Travel, DC Motor, M6
$4,095
Motorized Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, M6
$6,705
Motorized Linear Stage, 100 mm Travel, DC Motor, Rotary Encoder, M6
$4,400
Motorized Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, M6
$6,995
high performance ils series motorized linear stage
Motorized Linear Stage, 150 mm Travel, DC Motor, Rotary Encoder, M6
$4,805
high performance ils series motorized linear stage
Motorized Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, M6
$7,535
high performance ils series motorized linear stage
Motorized Linear Stage, 200 mm Travel, DC Motor, Rotary Encoder, M6
$5,295
high performance ils series motorized linear stage
Motorized Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, M6
$8,150
Motorized Linear Stage, 250 mm Travel, DC Motor, Rotary Encoder, M6
$5,945
Motorized Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, M6
$8,775

We also offer versions that are compatible with our SMC100CC Controller as well as Stepper Motor and Linear Motor versions.

Specifications

Features

DC Motor for High Speed and Repeatability

ILS stages with DC Motors are best characterized by their high speeds, smooth motion, good efficiency and a high power/weight ratio. As such, they are preferable to stepper motor stages for applications requiring high dynamic speed and tight repeatability. The ILS-CC and ILS-HA DC motor stages are compatible with Newport's XPS and ESP301 motion controllers.

We also offer an ILS-CCL version of these stages with a maximum speed of 50 mm/s that are compatible only with our SMC100CC single axis motion controller.

ILS Stage Motor Options

ILS Series stages are available with the following motors:

  • Stepper Motor (ILS-BPP) - For less demanding applications, a stepper motor can be a more economical solution than a DC motor.
  • High-torque DC motor (ILS-CC) - Best characterized by their high speeds, smooth motion, good efficiency and a high power/weight ratio, DC motors are preferable to stepper motor stages for applications requiring high dynamic speed and tight repeatability.
  • Linear Motor (ILS-LM) - The ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor. This drive system is noise-free and provides higher speed, acceleration and system responsiveness without the wear associated with motor brushes or drive screws.
ILS-CC (DC Motor) ILS-BPP (Stepper Motor) ILS-LM (Linear Motor)
Travel Range (mm) 50 / 100 / 150 / 200 / 250 50 / 100 / 150 / 200 / 250 100 / 200 / 300
Maximum Speed (mm/s) 100 50 500
Minimum Incremental Motion (nm) 1000 1000 10
Uni-directional Repeatability, Guaranteed (µm) ±0.5 ±0.5
Bi-directional Repeatability Guaranteed (µm) ±1.00 ±1.0 ±0.3
Accuracy, Guaranteed (µm) ±1.5 / ±2.0 / ±2.5 / ±3.75 / ±5.0 ±1.5 / ±2.0 / ±2.5 / ±3.75 / ±5.0 ±1.5 / ±2.0 / ±2.5

FEM Optimized Aluminum Body

Finite element method (FEM) was used to optimize the structural design of the ILS Series stage aluminum body allowing for extreme stiffness and minimizing bi-metal bending without compromising weight. The rigid body design reduces deflection under load allowing for the highest performance possible in an aluminum stage design. FEM optimized IMS stages are also available which offer longer travel ranges, higher load capacities, and larger moving platforms.

Rotary or Linear Encoder Options

ILS-CC stages feature a 4000 pts/rev. encoder mounted directly on the screw in order to prevent screw/motor coupling errors, consequently boosting stage motion accuracy. For more demanding precision positioning requirements, the ILS-HA versions utilize an integrated linear scale that provides 0.1 µm resolution feedback and delivers 0.3 µm minimum incremental motion.

Rotary Encoder

Linear Encoder

Recirculating Ball Bearing Slides

The recirculating ball bearing slides provide excellent payload capabilities and longer life with accurate linear trajectory. It mitigates the issue of ball cage migration, which is typically found on linear ball bearings or crossed roller bearings.

Backlash-free Precision Ground Ballscrew

These motorized linear stages include a preloaded, backlash-free, precision ground ball screw, which provides smooth, rapid motion with short step and settling time. The screw profile is designed to reduce heating effects, extending the life of the stage.

Other ILS Stage Features

A rigid top cover prevents damage to the drive train and protects it from dust and debris. ILS Series stages also feature an origin located at the center of travel for repeatable initialization, limit switches to prevent over travel, and elastomeric end-of-run dampers for smooth emergency braking.

Error Mapping Services

For critical positioning applications, Newport offers error mapping upon request for select ILS-HA stages driven by our XPS advanced motion controller. We will measure, implement, and verify the results of this error map that will individually optimize each stage's position accuracy. In addition, multi-axis error mapping is also available. Measurements are made at 20.0 ±0.2 °C. A certificate of calibration will be provided with your stage. Actual data may also be provided upon request.

Multi-Axis Assemblies

Newport's standard motorized stages and components can be easily combined to create hundreds of possible multi-axis systems. Depending on the products and application, our standard assemblies are available with the following precision alignments:

  • Orthogonality to 50 μrad
  • Axes Coincidence to 20 μm

XY Assembly

An IMS300 linear stage (X-axis) and ILS150 linear stage (Y-axis) mounted directly to each other for high precision and accuracy in two axes of linear motion.

X-Θz Assembly

An ILS150 linear stage (X-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in one axis of linear motion and one axis of rotary motion.

XYZ Assembly

An IMS linear stage (X-axis), an ILS linear stage (Y-axis) mounted directly to the IMS, and an ILS linear stage mounted on an EQ120 right angle bracket (Z-axis) provide high precision and accuracy in three axes of linear motion.

X-Θy Assembly

An ILS linear stage and an RV rotation stage mounted on an EQ120 right angle bracket for high precision and accuracy in one axis of linear motion and one axis of rotary motion.

XZ-Θz Assembly

An ILS250 linear stage (X-axis), a GTS30V vertical stage (Z-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in two axes of linear motion and one axis of rotary motion.

XY-Θz Assembly

An IMS300 linear stage (X-axis), an ILS150 linear stage (Y-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in two axes of linear motion and one axis of rotary motion.

Individual Stage Metrology Report is Included

Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.

ILS Stage Load Characteristics

Compatible Controllers

The ILS-CC and ILS-HA versions are compatible with XPS-D, XPS-RLD and legacy XPS-RL motion controllers. To use an XPS controller, the appropriate driver module (sold separately from the controller) shown in the table below must drive the stage.

The ILS-CC and ILS-HA are also plug-and-play compatible with the ESP302 and legacy ESP301 motion controllers.

The ILS-CCL is compatible only with the SMC100CC single-axis DC motor motion controller.

Version  Maximum Power Consumption (W) Compatible XPS-D or XPS-RLD Driver Module Compatible XPS-RL Driver Module ESP302 or ESP301 Compatibility SMC100 Compatibility
ILS-CCL 30 No No No SMC100CC
ILS-CC 70 XPS-DRV11 XPS-DRV01 Yes No
ILS-HA 60 XPS-DRV11 XPS-DRV01 Yes No