Compare Model Drawings, CAD & Specs Travel Range Drive Type Feedback Thread Type Availability Price
Motorized Linear Stage, 50 mm Travel, DC Motor, Rotary Encoder, 1/4-20
$4,032
In Stock
50 mm DC Motor Rotary Encoder 1/4-20
In Stock
Motorized Linear Stage, 50 mm, DC Motor, SMC100CC, 1/4-20
$4,032
50 mm DC Motor Rotary Encoder 1/4-20
Motorized Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, 1/4-20
$6,613
50 mm DC Motor Linear Encoder 1/4-20
Motorized Linear Stage, 100 mm Travel, DC Motor, Rotary Encoder, 1/4-20
$4,341
In Stock
100 mm DC Motor Rotary Encoder 1/4-20
In Stock
Motorized Linear Stage, 100 mm, DC Motor, SMC100CC, 1/4-20
$4,341
100 mm DC Motor Rotary Encoder 1/4-20
Motorized Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, 1/4-20
$6,902
100 mm DC Motor Linear Encoder 1/4-20
high performance ils series motorized linear stage
Motorized Linear Stage, 150 mm Travel, DC Motor, Rotary Encoder, 1/4-20
$4,747
5 Weeks
150 mm DC Motor Rotary Encoder 1/4-20
5 Weeks
high performance ils series motorized linear stage
Motorized Linear Stage, 150 mm, DC Motor, SMC100CC, 1/4-20
$4,747
150 mm DC Motor Rotary Encoder 1/4-20
high performance ils series motorized linear stage
Motorized Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, 1/4-20
$7,445
In Stock
150 mm DC Motor Linear Encoder 1/4-20
In Stock
Motorized Linear Stage, 200 mm Travel, DC Motor, Rotary Encoder, 1/4-20
$5,226
200 mm DC Motor Rotary Encoder 1/4-20
Motorized Linear Stage, 200 mm, DC Motor, SMC100CC, 1/4-20
$5,226
200 mm DC Motor Rotary Encoder 1/4-20
Motorized Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, 1/4-20
$8,053
200 mm DC Motor Linear Encoder 1/4-20
Motorized Linear Stage, 250 mm Travel, DC Motor, Rotary Encoder, 1/4-20
$5,878
250 mm DC Motor Rotary Encoder 1/4-20
Motorized Linear Stage, 250 mm, DC Motor, SMC100CC, 1/4-20
$5,878
250 mm DC Motor Rotary Encoder 1/4-20
Motorized Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, 1/4-20
$8,661
250 mm DC Motor Linear Encoder 1/4-20
Motorized Linear Stage, High Performance, 50 mm Travel, DC Motor, M6
$4,032
50 mm DC Motor Rotary Encoder M6
Motorized Linear Stage, 50 mm, DC Motor, SMC100CC, M6
$4,032
50 mm DC Motor Rotary Encoder M6
Motorized Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, M6
$6,613
50 mm DC Motor Linear Encoder M6
Motorized Linear Stage, 100 mm Travel, DC Motor, Rotary Encoder, M6
$4,341
100 mm DC Motor Rotary Encoder M6
Motorized Linear Stage, 100 mm, DC Motor, SMC100CC, M6
$4,341
100 mm DC Motor Rotary Encoder M6
Motorized Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, M6
$6,902
100 mm DC Motor Linear Encoder M6
high performance ils series motorized linear stage
Motorized Linear Stage, 150 mm Travel, DC Motor, Rotary Encoder, M6
$4,747
150 mm DC Motor Rotary Encoder M6
high performance ils series motorized linear stage
Motorized Linear Stage, 150 mm, DC Motor, SMC100CC, M6
$4,747
150 mm DC Motor Rotary Encoder M6
high performance ils series motorized linear stage
Motorized Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, M6
$7,445
150 mm DC Motor Linear Encoder M6
high performance ils series motorized linear stage
Motorized Linear Stage, 200 mm Travel, DC Motor, Rotary Encoder, M6
$5,226
200 mm DC Motor Rotary Encoder M6
high performance ils series motorized linear stage
Motorized Linear Stage, 200 mm, DC Motor, SMC100CC, M6
$5,226
200 mm DC Motor Rotary Encoder M6
high performance ils series motorized linear stage
Motorized Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, M6
$8,053
200 mm DC Motor Linear Encoder M6
Motorized Linear Stage, 250 mm Travel, DC Motor, Rotary Encoder, M6
$5,878
250 mm DC Motor Rotary Encoder M6
Motorized Linear Stage, 250 mm, DC Motor, SMC100CC, M6
$5,878
250 mm DC Motor Rotary Encoder M6
Motorized Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, M6
$8,661
250 mm DC Motor Linear Encoder M6

Stepper Motor and Linear Motor versions are also available.

Specifications

Features

FEM Optimized Aluminum Body

Finite element method (FEM) was used to optimize the structural design of the ILS Series stage aluminum body allowing for extreme stiffness and minimizing bi-metal bending without compromising weight. The rigid body design reduces deflection under load allowing for the highest performance possible in an aluminum stage design. FEM optimized IMS stages are also available which offer longer travel ranges, higher load capacities, and larger moving platforms.

DC Motor for High Speed and Repeatability

DC Motors are best characterized by their high speeds, smooth motion, good efficiency and a high power/weight ratio. As such, they are preferrable to stepper motor stages for applications requiring high dynamic speed and tight repeatability. The ILS-CC and ILS-HA stages are compatible with Newport's XPS and ESP301 motion controllers. The ILS-CCL stages are compatible only with Newport's SMC100CC motion controller, with their maximum speed being half that of the ILS-CC.

Rotary or Linear Encoder Options

ILS-CC stages feature a 4000 pts/rev. encoder mounted directly on the screw in order to prevent screw/motor coupling errors, consequently boosting stage motion accuracy. For more demanding precision positioning requirements, the ILS-HA versions utilize an integrated linear scale that provides 0.1 µm resolution feedback and delivers 0.3 µm minimum incremental motion.

Rotary Encoder

Linear Encoder

Recirculating Ball Bearing Slides

The recirculating ball bearing slides provide excellent payload capabilities and longer life with accurate linear trajectory. It mitigates the issue of ball cage migration, which is typically found on linear ball bearings or crossed roller bearings.

Backlash-free Precision Ground Ballscrew

These motorized linear stages include a preloaded, backlash-free, precision ground ball screw, which provides smooth, rapid motion with short step and settling time. The screw profile is designed to reduce heating effects, extending the life of the stage.

Other ILS Stage Features

A rigid top cover prevents damage to the drive train and protects it from dust and debris. ILS Series stages also feature an origin located at the center of travel for repeatable initialization, limit switches to prevent over travel, and elastomeric end-of-run dampers for smooth emergency braking.

Individual Stage Metrology Report is Included

Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.

Error Mapping Services

For critical positioning applications, Newport offers error mapping upon request for select ILS-HA stages driven by our XPS advanced motion controller. We will measure, implement, and verify the results of this error map that will individually optimize each stage's position accuracy. In addition, multi-axis error mapping is also available. Measurements are made at 20.0 ±0.2 °C. A certificate of calibration will be provided with your stage. Actual data may also be provided upon request.

Multi-Axis Assemblies

Newport's standard motorized stages and components can be easily combined to create hundreds of possible multi-axis systems. Depending on the products and application, our standard assemblies are available with the following precision alignments:

  • Orthogonality to 50 μrad
  • Axes Coincidence to 20 μm

XY Assembly

An IMS300 linear stage (X-axis) and ILS150 linear stage (Y-axis) mounted directly to each other for high precision and accuracy in two axes of linear motion.

X-Θz Assembly

An ILS150 linear stage (X-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in one axis of linear motion and one axis of rotary motion.

XYZ Assembly

An IMS linear stage (X-axis), an ILS linear stage (Y-axis) mounted directly to the IMS, and an ILS linear stage mounted on an EQ120 right angle bracket (Z-axis) provide high precision and accuracy in three axes of linear motion.

X-Θy Assembly

An ILS linear stage and an RV rotation stage mounted on an EQ120 right angle bracket for high precision and accuracy in one axis of linear motion and one axis of rotary motion.

XZ-Θz Assembly

An ILS250 linear stage (X-axis), a GTS30V vertical stage (Z-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in two axes of linear motion and one axis of rotary motion.

XY-Θz Assembly

An IMS300 linear stage (X-axis), an ILS150 linear stage (Y-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in two axes of linear motion and one axis of rotary motion.

ILS Stage Load Characteristics

Compatible Controllers

The ILS-CC and ILS-HA versions are compatible with XPS-D, XPS-RLD and XPS-RL motion controllers. To use an XPS controller, the appropriate driver module (sold separately from the controller) shown in the table below must drive the stage.

The ILS-CC and ILS-HA are also plug-and-play compatible with the ESP302 and ESP301 motion controllers.

The ILS-CCL is compatible only with the SMC100CC single-axis DC motor motion controller.

Version  Maximum Power Consumption (W) Compatible XPS-D or XPS-RLD Driver Module Compatible XPS-RL Driver Module ESP302 or ESP301 Compatbility SMC100 Compatibility
ILS-CC 70 XPS-DRV11 XPS-DRV01 Yes No
ILS-CCL 30 N/A N/A No SMC100CC
ILS-HA 60 XPS-DRV11 XPS-DRV01 Yes No

M- metric versions have the same compatiblity as the English version shown.