Compare Model Drawings, CAD & Specs Availability Price
9066-COM-V
Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum, No Baseplate
$714
9066-COM-V Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum, No Baseplate $714
9066-X-V
Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum
$817
9066-X-V Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum $817
9066-XY-R-V
XY Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum
$1,495
9066-XY-R-V XY Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum $1,495
9066-XY-L-V
XY Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum, Left-Handed
$1,495
9066-XY-L-V XY Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum, Left-Handed $1,495
9066-XZ-V
XZ Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum
$1,672
9066-XZ-V XZ Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum $1,672
9066-XYZ-R-V
XYZ Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum
$2,365
9066-XYZ-R-V XYZ Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum $2,365
9066-XYZ-L-V
XYZ Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum, Left-Handed
$2,255
9066-XYZ-L-V XYZ Linear Stage, 0.5 in. Travel, 4-40, 8-32, 1/4-20, Vacuum, Left-Handed $2,255
9066-COM-V-M
Linear Stage,12.7 mm Travel, M2.5, M4, M6, Vacuum, No Baseplate
$714
9066-COM-V-M Linear Stage,12.7 mm Travel, M2.5, M4, M6, Vacuum, No Baseplate $714
9066-X-V-M
Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum
$817
9066-X-V-M Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum $817
9066-XY-R-V-M
XY Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum
$1,495
9066-XY-R-V-M XY Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum $1,495
9066-XY-L-V-M
XY Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum, Left-Handed
$1,495
9066-XY-L-V-M XY Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum, Left-Handed $1,495
9066-XZ-V-M
XZ Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum
$1,672
9066-XZ-V-M XZ Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum $1,672
9066-XYZ-R-V-M
XYZ Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum
$2,365
9066-XYZ-R-V-M XYZ Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum $2,365
9066-XYZ-L-V-M
XYZ Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum, Left-Handed
$2,255
9066-XYZ-L-V-M XYZ Linear Stage, 12.7 mm Travel, M2.5, M4, M6, Vacuum, Left-Handed $2,255

Specifications

  • Maximum Stage Travel
    12.7 mm
  • Centered Normal Load Capacity
    111 N
  • Vertical Axial Load Capacity
    44.5 N
  • Angular Deviation
    150 µrad
  • Material
    Stainless Steel
  • Bearings
    Crossed-Roller Bearings
  • Vacuum Compatibility
    10-6 hPa
  • Recommended Piezo Actuator
    8301-V

Features

Clean Assembled Using Low vapor Pressure Grease

Vacuum compatible crossed roller bearing stages are clean assembled and made with low vapor pressure grease appropriate for use in vacuum pressures as low as down to 10-6 Torr. 9066 and 9067 versions are also available without a baseplate for easier integration into the volume restrictions typical of vacuum systems.

Precision Control and Smooth Translation

These vacuum compatible, crossed-roller translation stages provide low profile, yet solid and sturdy linear translation. Like their standard versions, the weight load rests on the actuators of the stages to support load capacities up to 50 lb. in both horizontal and vertical orientations (including the X-configured stage), and can be locked in place. This also allows for the high load capacity of up to 50 lb. The micron-scale travel precision typically needed is achieved with an angular deviation of <150 µrad and straight-line accuracy better than 3 microns.

Right or Left Handed Stage Configurations

These stages come in mirror-image right and left-hand versions for more flexibility in how you lay out your experiment on the table, so there's never a need to reach over your work to make adjustments on the far side. 

Low Profile X Translation Stages

We offer low profile -COM commercial versions of these stages designed to fit directly into your system. They not include the mounting base plate for reduced height and lower cost.

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