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High Resolution Target, Negative, Clear Lines on Opaque Background
In Stock
In Stock
High Resolution Target, Positive, Opaque Lines on Clear Background
In Stock
In Stock


Highest Resolution Target Commercially Available

The Super High Resolution USAF targets provide the finest resolution commercially available on the market. With the minimum feature as small as 137 nanometers bar width, typically these features are only easily seen with a scanning electron microscope (SEM). With microscope systems going to higher and higher resolution levels, scientists require special tools like this to help test their most demanding optical systems.

Please note that the target itself is the small feature in the center of the diamond aperture.  The pattern in the enlarged square on the right side of the slide is illustration opposite to target element in the center of diamond aperture - just like developed patterns of negative photoresist in photolithography process. Please refer to correlations in the table below.

Part Number Pattern in Enlarged Square Area Target in Center of Diamond Aperture
HIGHRES-1 Black Line Transparent Line
HIGHRES-1 White Background Opaque Background
HIGHRES-2 White Line Opaque Line
HIGHRES-2 Black Background Transparent Background

A typical application would be to test a high resolution microscope at the highest magnification.  This product would facilitate the testing of the microscope systems' top resolution. 


The target area is quartz with 1,000 angstroms of chrome. The quartz substrate is fastened to the metal slide with UV curing epoxy.  Rarely, microscopic amounts of blocking wax may be present post manufacture.  If this is the case, please remove the fragments with D-limonene.  Acetone can work in this case.  However, be wary of using too much which may loosen the epoxy.  Soap and water will also work or any other cleaning agent used to clean microscope objective immersion oil. Do not soak in any solvent.

Cleaning Instructions

Because these High Resolution Test Targets are made under a proprietary lithography process, scientists should be careful when cleaning this optic. Please do not rub the target with a wet or dry cloth.  Abrasive techniques for cleaning is not recommended. Even though the metal slide protects well from dropping or breakage, the target itself can be scratched or physically damaged if special care is not taken.

Newport recommends using D-Limonene which is a natural terpene.  it is a colorless liquid hydrocarbon whose name comes from the lemon peel.  If you do not have this on hand, soapy water can be used.  Acetone is not recommended.

USAF Test Target Mounting

If you are not testing a microscope and need to mount the resolution target in free space, the M-PPF50 mount works very well to mate to the HIGHRES targets.  There are two springs that can easily hold the HIGHRES target in place. Please note that the mount is metric, so the mount will only mate to a metric post.  The posts, whether metric or english, will have the same diameter, so the post will be able to fit a metric or english post holder.  Please contact us if we can clarify this further.

Spatial Frequency (cycles per millimeter)

  • Element number is the number left or right to the lines.
  • Group number is the number on top of each area.
Element Number Group Number
4 5 6 7 8 9 10 11
1 16.0 32.0 64.0 128.0 256.0 512.0 1,024 2,048
2 18.0 35.9 71.8 143.7 287.4 574.7 1,149 2,299
3 20.2 40.3 80.6 161.3 322.5 645.1 1,290 2,580
4 22.6 45.3 90.5 181.0 362.0 724.1 1,448 2,896
5 25.4 50.8 101.6 203.2 406.4 812.7 1,625 3,251
6 28.5 57.0 114.0 228.1 456.1 912.3 1,825 3,649

Bar/Space Width Calculations (microns)

Element Number Group Number
4 5 6 7 8 9 10 11
1 31.250 15.625 7.813 3.906 1.953 0.977 0.488 0.244
2 27.841 13.920 6.960 3.480 1.740 0.870 0.435 0.218
3 24.803 12.402 6.201 3.100 1.550 0.775 0.388 0.194
4 22.097 11.049 5.524 2.762 1.381 0.691 0.345 0.173
5 19.686 9.843 4.922 2.461 1.230 0.615 0.308 0.154
6 17.538 8.769 4.385 2.192 1.096 0.548 0.274 0.137