The GTS70V is a compact, longest travel, platform, vertical stage that combines outstanding trajectory accuracy with high precision capability of 0.1 μm Minimum Incremental Motion and a travel range of 70 mm. Features include: a vertical guide system composed of matched pairs of anti-creep crossed roller bearings resulting in high-precision, ripple-free motion, a folded DC motor with a precision ground and a low-friction lead screw designed to deliver ultra-smooth motion and a linear encoder for high accuracy. The GTS70V does not back drive even with heavy loads, offering excellent in-position stability. A reduction belt between the motor and lead screw increases available output torque and robustness for servo loop sensitivity. The GTS70V is ideal for applications such as semiconductor wafer inspection, scanning, microscopy, laser machining, automated device alignment, metrology, quality control and applications requiring long travel vertical motion of 70 mm.
High-precision vertical motion is achieved using a direct vertical guiding system composed of matched pairs of anti-creep crossed roller bearings for the GTS30V and recirculating ball bearings for GTS70V. These linear guides were chosen to provide the straightest trajectory, smooth and precise motion and robust, long term operation. Additionally, the crossed roller bearings in GTS30V have the added advantage of more quiet, ripple-free motion, which is important in metrology level applications.
A folded DC motor with a precision ground, low-friction lead screw delivers ultra-smooth motion even at high loads. A reduction belt between the motor and the lead screw increases the available output torque and reduces servo sensitivity, ensuring 100 nm MIM.
Precision position feedback is supplied by a linear scale encoder, which contributes to sub-micron MIM and makes the GTS-V less susceptible to hysteresis. The direct read encoder system is impervious to position drift caused by motion-induced heating of the lead screw for improved accuracy and repeatability. For higher load applications, the GTS70VCC with a motor-mounted rotary encoder is recommended.
All GTS-V stages are ESP-compatible. When connected to a Newport controller, they are quickly recognized and their operating parameters are configured without the need for user input. This Plug and Play feature is not only transparent to the user, but it also ensures the safe operation of the stage.
The manual knob is convenient when the power is off and when quick and coarse adjustment is needed.
When combined with Newport motorized linear and rotation stages, the GTS-V vertical stage is a space-saving alternative to traditional stacks of stages and provides unobstructed access to the payload from any side. Furthermore, centering the payload over the bearings ensures less cantilevering load effects and Abbe induced motion errors.
Ultra-High Velocity Learn More
