Hexapods Guide

Overview

HXP Hexapods offer an easy, elegant solution to complex, multi-axis motion in a compact construction. Its dedicated firmware simplifies the programming of complex motion through the use of two coordinate systems and automatically computes coordinate transformations for straightforward programming of motion.

HXP Series Hexapod collage
  • Single device with 6 independent axes of motion
  • Light and compact design, with high stiffness
  • No accumulation of motion errors
  • No moving cables
  • RightPath trajectory control
  • Two virtual centers of rotation set by software

To choose the right HXP Series Hexapod, 4 selection tables based on precision, load capacity, high accuracy and vacuum are provided for applications like: Optical Alignment and Calibration, Biomedical Engineering and Surgical Robotics, Sensor Metrology and Calibration, Semiconductor Test and Metrology. When evaluating which Newport hexapod model might be right for your application, be sure to try our latest HexaViz™ Hexapod Simulation Software to virtually explore and test against your specific multi-axis motion requirements.

For custom multi-axis hexapod motion solutions, contact us to discuss your unique needs.

Standard High Precision Hexapods

HXP50-MECA
HXP50-MECA 		HXP100-MECA
HXP100-MECA 		HXP100P-MECA
HXP100P-MECA
Size H [in. (mm)] 5.94 (151) 8.23 (209) 8.23 (209)
Ø [in. (mm)] 7.87 (200) 11.81 (300) 11.81 (300)
Mass [lb (kg)] 5.9 (2.7) 12.3 (5.6) 12.3 (5.6)
Travel Range (1) X, Y, Z (mm) ±17, ±15, ±7 ±27.5, ±25, ±14 ±27.5, ±25, ±14
U, V, W (°) ±9, ±8.5, ±18 ±11.5, ±10.5, ±19 ±11.5, ±10.5, ±19
MIM* X, Y, Z (µm) 0.1, 0.1, 0.05 0.5, 0.5, 0.25 0.1, 0.1, 0.05
U, V, W (°) 0.00005, 0.00005, 0.0001 0.00025, 0.00025, 0.0005 0.00005, 0.00005, 0.0001
Uni-Dir. Repeatability X, Y, Z (µm) 0.2, 0.2, 0.1 0.5, 0.5, 0.25 0.2, 0.2, 0.1
U, V, W (°) 0.0001, 0.0001, 0.0002 0.00025, 0.00025, 0.0005 0.0001, 0.0001, 0.0002
Max. Velocity X, Y, Z (mm/s) 14, 12, 5 2.5, 2, 1 12, 10, 5
U, V, W (°/s) 6, 6, 15 1.8, 1.7, 3 8, 8, 16
Stiffness (2) X, Y, Z (N/µm) 2, 2, 25 5, 5, 40 3, 3, 24
Max. Load (3)(4) (kg) 5 20 6
Cable Length (m) 3 3 3

* Minimum incremental motion

  1. Travel ranges are interdependent. The listed values are max. travels per axis when all other axis are in their centered position.
  2. Stiffness depends on Hexapod position. Values are given for all axis in their centered position.
  3. Horizontal base plate.
  4. See graphs for maximum payload height and cantilever distance on product pages.

Standard High Precision Hexapods

Standard High Load Capacity Hexapods

HXP200-MECA
HXP200-MECA		 HXP200S-MECA
HXP200S-MECA		 HXP1000-MECA
HXP1000-MECA
Size H [in. (mm)] 12.17 (309) 11.81 (300) 15.56 (395)
Ø [in. (mm)] 13.19 (335) 19.09 (485) 21.65 (550)
Mass [lb (kg)] 34.2 (15.5) 55.1 (25) 132.3 (60)
Travel Range (1) X, Y, Z (mm) ±59, ±54, ±25 ±40, ±45, ±27 93/-62, ±69, ±39.5
U, V, W (°) ±15, ±14.5, ±30 ±9, ±8, ±15 ±11, ±10, ±19.5
MIM* X, Y, Z (µm) 0.2, 0.2, 0.1 0.15, 0.15, 0.15 0.3, 0.3, 16
U, V, W (°) 0.0001, 0.0001, 0.0002 0.0001, 0.0001, 0.0001 0.00006, 0.00006, 0.0001
Uni-Dir. Repeatability X, Y, Z (µm) 0.25, 0.25, 0.2 0.2, 0.2, 0.2 0.3, 0.3, 0.16
U, V, W (°) 0.0002, 0.0002, 0.00025 0.0002, 0.0002, 0.0002 0.00006, 0.00006, 0.0001
Max. Velocity X, Y, Z (mm/s) 81, 70, 26 47, 54, 29 9, 9, 4
U, V, W (°/s) 16, 15, 41 10, 9.3, 16.5 1.4, 1.4, 2.8
Stiffness (2) X, Y, Z (N/µm) 3, 3, 40 6, 6, 30 10, 10, 100
Max. Load (3)(4) (kg) 50 85 450
Cable Length (m) 5 5 3

* Minimum incremental motion

  1. Travel ranges are interdependent. The listed values are max. travels per axis when all other axis are in their centered position.
  2. Stiffness depends on Hexapod position. Values are given for all axis in their centered position.
  3. Horizontal base plate.
  4. See graphs for maximum payload height and cantilever distance on product pages.

Standard High Load Capacity Hexapods

High Accuracy Hexapods

    HXP50HA-MECA
HXP50HA-MECA		 HXP100HA-MECA
HXP100HA-MECA		 HXP100PHA-MECA
HXP100PHA-MECA
Size H [in. (mm)] 8.23 (209) 8.23 (209) 8.23 (209)
  Ø [in. (mm)] 11.81 (300 11.81 (300) 11.81 (300)
Mass [lb (kg)] 12.3 (5.6) 12.3 (5.6) 12.3 (5.6)
Travel Range (1) X, Y, Z (mm) ±27.5, ±25, ±14 ±27.5, ±25, ±14 ±27.5, ±25, ±14
  U, V, W (°) ±11.5, ±10.5, ±19 ±11.5, ±10.5, ±19 ±11.5, ±10.5, ±19
MIM* X, Y, Z (µm) 0.1, 0.1, 0.05 0.5, 0.5, 0.25 0.1, 0.1, 0.05
  U, V, W (°) 0.00005, 0.00005, 0.0001 0.00025, 0.00025, 0.0005 0.00005, 0.00005, 0.00005
Uni-Dir. Repeatability X, Y, Z (µm) 0.5, 0.5, 0.25 0.5, 0.5, 0.25 0.2, 0.2, 0.1
  U, V, W (°) 0.00025, 0.00025, 0.0005 0.00025, 0.00025, 0.0005 0.0001, 0.0001, 0.0002
Max. Velocity X, Y, Z (mm/s) 2.5, 2, 1 2.5, 2, 1 12, 10, 5
  U, V, W (°/s) 1.8, 1.7, 3 1.8, 1.7, 3 8, 8, 16
Stiffness (2) X, Y, Z (N/µm) 5, 5, 40 5, 5, 40 3, 3, 24
Max. Load (3)(4) (kg) 20 20 6
Cable Length (m) 3 3 3

* Minimum incremental motion

  1. Travel ranges are interdependent. The listed values are max. travels per axis when all other axis are in their centered position.
  2. Stiffness depends on Hexapod position. Values are given for all axis in their centered position.
  3. Horizontal base plate.
  4. See graphs for maximum payload height and cantilever distance on product pages.

High Accuracy Hexapods

Vacuum Compatible Hexapods

HXP50V6-MECA
HXP50V6-MECA 		HXP100V6-MECA
HXP100V6-MECA
Size H [in. (mm)] 5.94 (151) 8.23 (209)
Ø [in. (mm)] 7.87 (200) 11.81 (300)
Mass [lb (kg)] 5.9 (2.7) 12.3 (5.6)
Travel Range (1) X, Y, Z (mm) ±17, ±15, ±7 ±27.5, ±25, ±14
U, V, W (°) ±9, ±8.5, ±18 ±11.5, ±10.5, ±19
MIM* X, Y, Z (µm) 0.2/0.8(3), 0.2/0.8(3), 0.1/0.4(3) 0.5, 0.5, 0.25
U, V, W (°) 0.0001/0.0004, 0.0001/0.0004, 0.0002/0.0008 0.00025, 0.00025, 0.0005
Uni-Dir. Repeatability X, Y, Z (µm) 0.4, 0.4, 0.2 0.1, 0., 0.5
U, V, W (°) 0.0008, 0.0008, 0.0004 0.0005, 0.0005, 0.001
Max. Velocity X, Y, Z (mm/s) 2, 1.9, 0.8 0.5, 0.5, 0.25
U, V, W (°/s) 2.4, 2.4, 6 0.2, 0.2, 0.4
Stiffness (2) X, Y, Z (N/µm) 2, 2, 25 2, 2, 25
Max. Load (4)(5) (kg) 5 20
Cable Length (m) 3 3

* Minimum incremental motion

  1. Travel ranges are interdependent. The listed values are max. travels per axis when all other axis are in their centered position.
  2. Stiffness depends on Hexapod position. Values are given for all axis in their centered position.
  3. Values in Open-loop/Closed-loop.
  4. Horizontal base plate.
  5. See graphs for maximum payload height and cantilever distance on product pages.
  6. Vacuum version to 10-6 hPa.

Vacuum Compatible Hexapods