Vacuum Compatible Hexapod, 125 mm Diameter Platform, 5 kg Load, M6

Model: HXP50V6-MECA

Vacuum Compatible Hexapod, 125 mm Diameter Platform, 5 kg Load, M6

Model: HXP50V6-MECA

Technical Specs

  • Type
    Vacuum Compatible
  • Size
    Ø200 x 151 mm
  • Platform Diameter
    125 mm
  • Centered Load Capacity
    50 N
  • Travel Range X, Y, Z
    ±17, ±15, ±7 mm
  • Travel Range ΘX, ΘY, ΘZ
    ±9, ±8.5, ±18 °
  • Minimum Incremental Motion X, Y, Z
    0.2, 0.2, 0.1 µm
  • Minimum Incremental Motion ΘX, ΘY, ΘZ
    0.1, 0.1, 0.2 mdeg
  • Uni-directional Repeatability X, Y, Z - Typical
    ±0.20, ±0.20, ±0.20 µm
  • Uni-directional Repeatability ΘX, ΘY, ΘZ - Typical
    ±0.40, ±0.40, ±0.20 mdeg
  • Maximum Speed X, Y, Z
    2, 1.9, 0.8 mm/s
  • Maximum Speed ΘX, ΘY, ΘZ
    2.4, 2.4, 6 °/s
  • Rigidity X, Y, Z
    2, 2, 25 N/µm
  • Connectors
    DB25 Male (6)
  • Cable Length
    1.5 m
  • Motor
    Stepper motor
  • Bi-directional Repeatability with Compensation Typical (Guaranteed)
    X,Y,Z: ±1.0 (na), ±1.0 (na), ±0.50 (na) µm
    U,V,W: ±0.50 (na), ±0.50 (na), ±1.0 (na) mdeg
  • Origin
    Optical, close to lower limit
  • Origin Repeatability
    X,Y,Z: ±5.0, ±5.0, ±2.5 µm
    U,V,W: ±2.5, ±2.5, ±5.0 mdeg
  • Encoder Resolution
    0.42283 µm
  • Minimum Incremental Motion
    Open Loop/Closed Loop
    X,Y,Z: 0.2/0.8, 0.2/0.8, 0.1/0.4 µm
    U,V,W: 0.1/0.4, 0.1/0.4, 0.2/0.8 mdeg
  • Number of Axis
    6
  • Weight
    2.2 kg  
  • Vacuum Compatibility
    10-6 hPa
  • Thread Type
    M6
  • MTBF
    5,000 h (25% load, 10% duty cycle)
  • RoHS
    Compliant

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Vacuum Compatible Hexapod, 125 mm Diameter Platform, 5 kg Load, M6

Model: HXP50V6-MECA

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