Hexapod, Vacuum Compatible, 200 mm Diameter Platform, 20 kg Load, M6

The HXP100V6-MECA Vacuum Compatible Hexapod is a parallel kinematic motion device that provides six degrees of freedom: X, Y, Z, pitch, roll, and yaw. The HXP100 V6 has a 20 kg centered load capacity and is an effective solution to complex motion applications that demand high load capacity and accuracy in up to six independent axes. Contrary to the image of being complex and highly priced, the HXP100 hexapod is not only affordable but extremely easy to use. Determine if the HXP100V6-MECA is the right hexapod for your application by using Newport's free HexaViz Simulation Software. Order with an HXP100V6-ELEC.-D. Note that mechanics are designed to operate to 10^-6 Torr, but the connectors are not vacuum compatible. For vacuum compatible connectors, outgassing tests or for faster delivery, call Newport (800) 222 6440.

Specifications

Technical Specs

Type
Vacuum Compatible
Size
Ø300 x 209 mm
Centered Load Capacity
200 N
Travel Range X, Y, Z
±27.5, ±25, ±14 mm
Travel Range ΘX, ΘY, ΘZ
±11.5, ±10.5, ±19 °
Minimum Incremental Motion X, Y, Z
0.5, 0.5, 0.25 µm
Minimum Incremental Motion ΘX, ΘY, ΘZ
0.25, 0.25, 0.5 mdeg
Uni-directional Repeatability X, Y, Z - Typical
±0.50, ±0.50, ±0.50 µm
Uni-directional Repeatability ΘX, ΘY, ΘZ - Typical
±0.25, ±0.25, ±0.50 mdeg
Maximum Speed X, Y, Z
0.5, 0.5, 0.25 mm/s
Maximum Speed ΘX, ΘY, ΘZ
0.2, 0.2, 0.4 °/s
Rigidity X, Y, Z
5, 5, 40 N/µm
Bi-directional Repeatability (X,Y,Z), Typical
±2.5, ±2.5, ±1.5 µm
Bi-directional Repeatability (ΘX, ΘY, ΘZ), Typical
±1.25, ±1.25, ±2.5 mdeg

Connectors
DB25 Male (6)
Cable Length
1.5 m
Motor
Stepper motor
Origin
Optical, close to lower limit
Origin Repeatability
X,Y,Z: ±5.0, ±5.0, ±2.5 µm
U,V,W: ±2.5, ±2.5, ±5.0 mdeg
Encoder Resolution
0.118405537 µm
Number of Axis
6
Weight
7.2 kg
Vacuum Compatibility
10^-6 Torr
Thread Type
M6
MTBF
5,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE

Type
Vacuum Compatible
Size
Ø300 x 209 mm
Centered Load Capacity
200 N
Travel Range X, Y, Z
±27.5, ±25, ±14 mm
Travel Range ΘX, ΘY, ΘZ
±11.5, ±10.5, ±19 °
Minimum Incremental Motion X, Y, Z
0.5, 0.5, 0.25 µm
Minimum Incremental Motion ΘX, ΘY, ΘZ
0.25, 0.25, 0.5 mdeg
Uni-directional Repeatability X, Y, Z - Typical
±0.50, ±0.50, ±0.50 µm
Uni-directional Repeatability ΘX, ΘY, ΘZ - Typical
±0.25, ±0.25, ±0.50 mdeg
Maximum Speed X, Y, Z
0.5, 0.5, 0.25 mm/s
Maximum Speed ΘX, ΘY, ΘZ
0.2, 0.2, 0.4 °/s
Rigidity X, Y, Z
5, 5, 40 N/µm
Bi-directional Repeatability (X,Y,Z), Typical
±2.5, ±2.5, ±1.5 µm
Bi-directional Repeatability (ΘX, ΘY, ΘZ), Typical
±1.25, ±1.25, ±2.5 mdeg

Connectors
DB25 Male (6)
Cable Length
1.5 m
Motor
Stepper motor
Origin
Optical, close to lower limit
Origin Repeatability
X,Y,Z: ±5.0, ±5.0, ±2.5 µm
U,V,W: ±2.5, ±2.5, ±5.0 mdeg
Encoder Resolution
0.118405537 µm
Number of Axis
6
Weight
7.2 kg
Vacuum Compatibility
10^-6 Torr
Thread Type
M6
MTBF
5,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE

Resources & Downloads

Literature

HXP100 Data Sheet(3 MB, PDF)
HexaViz Hexapod Brochure(2.5 MB, PDF)
DS-102101 HXP100 Datasheet.pdf(3.4 MB, PDF)
HXP Series Hexapod Brochure(2.3 MB, PDF)
Vaccum Compatible Products Brochure(3.8 MB, PDF)

Technical Notes

Motion in 3-D: Newport Hexapod Coordinate Systems(476.8 kB, PDF)
Maintaining HXP Position after Controller Reboot(67.3 kB, PDF)
GroupPositionCurrentGet command and HXP controller.pdf(915.7 kB, PDF)

2D Product Drawings

HXP100V6-MECA(921.5 kB, PDF)

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