6-Axis Hexapod, 20 kg Load Capacity, Vacuum

Model: HXP100V6-MECA

6-Axis Hexapod, 20 kg Load Capacity, Vacuum

Model: HXP100V6-MECA

Technical Specs

  • Size
    Ø300 x 196 mm
  • Travel Range X, Y, Z
    ±27.5, ±25, ±14 mm
  • Travel Range ΘX, ΘY, ΘZ
    ±11.5, ±10.5, ±19 °
  • Minimum Incremental Motion X, Y, Z
    0.5, 0.5, 0.25 mm
  • Minimum Incremental Motion ΘX, ΘY, ΘZ
    0.25, 0.25, 0.5 °
  • Uni-directional Repeatability X, Y, Z - Typical
    ±0.50, ±0.50, ±0.50 µm
  • Uni-directional Repeatability ΘX, ΘY, ΘZ - Typical
    ±0.25, ±0.25, ± 0.50 mdeg
  • Maximum Speed X,Y,Z
    0.5, 0.5, 0.25 mm/s
  • Maximum Speed ΘX, ΘY, ΘZ
    0.2, 0.2, 0.4°/s
  • Centered Load Capacity
    200 N
  • Rigidity (X, Y, Z)
    5, 5, 40 N/µm
  • Cable Length
    5 m
  • Number of Axis
    6
  • Connectors
    25 pin sub D (not vacuum compatible)
  • Vacuum Compatibility
    10-6 hPa
  • Motor
    Stepper motor
  • Weight
    7.2 kg  
  • Type
    Vacuum Compatible Hexapod
  • Uni-directional Repeatability Typical (Guaranteed)
    X,Y,Z: ±0.50 (na), ±0.50 (na), ±0.25 (na) µ
    U,V,W: ±0.25 (na), ±0.25 (na), ±0.50 (na) mdeg
  • Bi-directional Repeatability with Compensation Typical (Guaranteed)
    X,Y,Z: ±2.5 (na), ±2.5 (na), ±1.5 (na) µm
    U,V,W: ±1.25 (na), ±1.25 (na), ±2.5 (na) mdeg
  • Origin Repeatability
    X,Y,Z: ±5.0, ±5.0, ±2.5 µm
    U,V,W: ±2.5, ±2.5, ±5.0 mdeg
  • Minimum Incremental Motion
    X,Y,Z: 1.0, 1.0, 0.5 µm
    U ,V,W: 0.50, 0.50, 1.0 mdeg

Resources & Downloads

Software
Manuals
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Technical Notes
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6-Axis Hexapod, 20 kg Load Capacity, Vacuum

Model: HXP100V6-MECA

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