Hexapod, High Accuracy, 200 mm Diameter Platform, 20 kg Load, M6

  • Type
    High Accuracy
  • Size
    Ø300 x 209 mm
  • Platform Diameter
    200 mm
  • Centered Load Capacity
    200 N
  • Travel Range X, Y, Z
    ±27.5, ±25, ±14 mm
  • Travel Range ΘX, ΘY, ΘZ
    ±11.5, ±10.5, ±19 °
  • Minimum Incremental Motion X, Y, Z
    0.5, 0.5, 0.25 µm
  • Minimum Incremental Motion ΘX, ΘY, ΘZ
    0.25, 0.25, 0.5 mdeg
  • Uni-directional Repeatability X, Y, Z - Typical
    ±0.14, ±0.13, ±0.05µm
  • Uni-directional Repeatability X, Y, Z - Guaranteed
    ±0.25, ±0.25, ±0.125 µm
  • Uni-directional Repeatability ΘX, ΘY, ΘZ - Typical
    ±0.125, ±0.125, ±0.25 mdeg
  • Maximum Speed X, Y, Z
    2.5, 2, 1 mm/s
  • Maximum Speed ΘX, ΘY, ΘZ
    1.8, 1.7, 3 °/s
  • Accuracy XYZ, Guaranteed
    ±10, ±10, ±5µm
  • Yaw X, Y, Z - Guaranteed
    ±75, ±75, ±75 µrad
  • Pitch X, Y, Z - Guaranteed
    ±75, ±75, ±75 µrad
  • Rigidity X, Y, Z
    5, 5, 40 N/µm
  • Bi-directional Repeatability (X,Y,Z), Typical
    ±2.0, ±2.0, ±1.0µm
  • Bi-directional Repeatability (ΘX, ΘY, ΘZ), Typical
    ±1.0 , ±1.0, ±2.0 mdeg
  • Bi-directional Repeatability X, Y, Z - Guaranteed
    ±3.0, ±3.0, ±2.0µm
  • Connectors
    DB25 - Male (6)
  • Cable Length
    3 m
  • Motor
    DC Servo
  • Origin
    Optical, close to lower limit
  • Origin Repeatability
    X,Y,Z: ±5.0, ±5.0, ±2.5 µm
    U,V,W: ±2.5, ±2.5, ±5.0 mdeg
  • Encoder Resolution
    0.005898864 µm
  • Number of Axis
    6
  • Weight
    7.2 kg
  • Thread Type
    M6
  • MTBF
    5,000 h (25% load, 10% duty cycle)
  • Compliance
    RoHS 3, CE