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SinguLYS - Single Axis Air Bearing Stage

SinguLYS - Single Axis Air Bearing Stage

  • Ceramic (SiC) Construction Provides Low Mass, High Rigidity, and Excellent Thermal Stability
  • Integrated Pressure-Vacuum Air Bearings and Linear Motor Drive for Clean Operation
  • Compact Footprint With Self-Supporting Body and Three-Point Mounting
2 Products
Compare Description Avail. Price Qty.
SinguLYS - Single Axis Air Bearing StageSinguLYS-B-1200Air Bearing Stage, SinguLYS B-1200
SinguLYS - Single Axis Air Bearing StageSinguLYS-S-370Air Bearing Stage, SinguLYS S-370
Viewing 2 of 2 Products | View All 2 Products
DynamYX<sup>®</sup> GT High-Throughput Stage

DynamYX® GT High-Throughput Stage

  • Designed for high-throughput applications with aggressive duty-cycles
  • Extremely rigid structure and high load capacity air bearings provides up to 2G acceleration
  • High-efficiency XY linear motors drive moving masses through respective center of gravity locations
DynamYX<sup>®</sup> RS Reticle Positioning Stage

DynamYX® RS Reticle Positioning Stage

  • Ideal for reticle inspection and repair applications
  • Acceleration: 0.25G X and Y Axes
  • Velocity: 250mm/sec
DynamYX<sup>®</sup> 300 Wafer Positioning Stage

DynamYX® 300 Wafer Positioning Stage

  • Designed for 300 mm wafer test, measurement & processing applications
  • Acceleration: 0.75G X-Axis, 1.5G Y-Axis
  • Velocity: 400mm/sec
DynamYX<sup>®</sup> Datum<sup>®</sup> Ultra-High Performance Stage

DynamYX® Datum® Ultra-High Performance Stage

  • Acceleration: 3G X-Axis, 5G Y-Axis
  • Velocity: 1000mm/sec
  • Repeatability: ±25nm (long term)
HybrYX<sup>®</sup> Hybrid Air Bearing XY Stage

HybrYX® Hybrid Air Bearing XY Stage

  • Excellent price-to-performance value for demanding industrial OEM applications
  • Great for scanning applications requiring ultra-low velocity ripple & dynamic following error
  • True single plane XY architecture with optional theta and Z-Tip-Tilt solutions
HybrYX<sup>®</sup> G5 Large Substrate Positioning Stage

HybrYX® G5 Large Substrate Positioning Stage

  • Excellent price-to-performance value for demanding industrial OEM applications
  • Ideal choice for scanning applications requiring ultra-low velocity ripple and dynamic following error
  • True single plane XY architecture with optional theta and Z-Tip-Tilt solutions
HybrYX<sup>®</sup> HD High Dynamic, Hybrid Air Bearing XY Stage with Soft Isolation System

HybrYX® HD High Dynamic, Hybrid Air Bearing XY Stage with Soft Isolation System

  • Excellent price-to-performance value for demanding industrial OEM applications
  • Ideal for scanning applications requiring ultra-low velocity ripple & minimal dynamic following error
  • True single plane XY architecture with optional theta and Z-Tip-Tilt solutions
NewDamp Elastomeric Vibration Isolators

NewDamp Elastomeric Vibration Isolators

  • Super high damping factor for supporting high throughput motion
  • Constant natural frequency design delivers much better isolation
  • Alternative to pneumatic or mechanical spring mounts
20 Products
Compare Description Avail. Price Qty.
NewDamp Elastomeric Vibration IsolatorsND41-BElastomeric Isolation Mount, NewDamp, 70-225 lb., Microlock Compatible
2 Weeks
$483
NewDamp Elastomeric Vibration IsolatorsM-ND01-AElastomeric Isolation Mount, NewDamp, 70-250 lb., Microlock Compatible
In Stock
$201
NewDamp Elastomeric Vibration IsolatorsM-ND20-AElastomeric Isolation Mount, NewDamp, 45-250 lb., Microlock Compatible
2 Weeks
$531
NewDamp Elastomeric Vibration IsolatorsM-ND30-AElastomeric Isolation Mount, NewDamp, 70-300 lb., Microlock Compatible
In Stock
$614
NewDamp Elastomeric Vibration IsolatorsM-ND40T-AElastomeric Isolation Mount, NewDamp, 100-450 lb., Microlock & X95 Rail
1 Week
$402
Viewing 5 of 20 Products | View All 20 Products
S-2000A Pneumatic Vibration Isolators with Automatic Re-Leveling

S-2000A Pneumatic Vibration Isolators with Automatic Re-Leveling

  • Top performance pneumatic isolators with vertical resonance as low as 1 Hz
  • Hybrid chamber design maximizes isolation bandwidth and stability
  • Highly accurate re-leveling improves repositioning after disturbance
20 Products
Compare Description Avail. Price Qty.
S-2000A Pneumatic Vibration Isolators with Automatic Re-LevelingS-2000A-116Pneumatic Vibration Isolator, Automatic Re-leveling, 16 in. Height
4 Weeks
S-2000A Pneumatic Vibration Isolators with Automatic Re-LevelingS-2000A-119.5Pneumatic Vibration Isolator, Automatic Re-leveling, 19.5 in. Height
4 Weeks
S-2000A Pneumatic Vibration Isolators with Automatic Re-LevelingS-2000A-122Pneumatic Vibration Isolator, Automatic Re-leveling, 22 in. Height
4 Weeks
S-2000A Pneumatic Vibration Isolators with Automatic Re-LevelingS-2000A-123.5Pneumatic Vibration Isolator, Automatic Re-leveling, 23.5 in. Height
4 Weeks
S-2000A Pneumatic Vibration Isolators with Automatic Re-LevelingS-2000A-128Pneumatic Vibration Isolator, Automatic Re-leveling, 28 in. Height
4 Weeks
Viewing 5 of 20 Products | View All 20 Products