Air Bearing Stage, SinguLYS B-1200
The Proprietary SiC ceramic beam used in the SinguLYS B-Series Bridge is 3 times lighter than steel and offers triple the stiffness of granite. These properties have allowed our customers to increase throughput in current and next-generation Flat Panel Display Inspection tools. The light and rigid pressure-vacuum air bearing carriage accomodates high (10 kg) cantilevered payloads and significantly reduces contamination to the payload below. Besides cleanliness, the frictionless design eliminates the need for mechanical bearing maintenance/lubrication.
Specifications
- BearingsVacuum/pressure air bearing
- Drive TypeIroncore linear motor
- Maximum Acceleration2 G
- Maximum Speed2.5 m/s
- On-Axis Accuracy± 0.5 µm
- Pitch20 µrad
- Roll20 µrad
- Yaw20 µrad
- Travel Range1200 mm
Resources & Downloads
Literature
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