SinguLYS-B-1200 Air Bearing Stage

Air Bearing Stage, SinguLYS B-1200

Model: SinguLYS-B-1200

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Product Series Overview

SinguLYS - Single Axis Air Bearing Stage

The Proprietary SiC ceramic beam used in the SinguLYS B-Series Bridge is 3 times lighter than steel and offers triple the stiffness of granite. These properties have allowed our customers to increase throughput in current and next-generation Flat Panel Display Inspection tools. The light and rigid pressure-vacuum air bearing carriage accomodates high (10 kg) cantilevered payloads and significantly reduces contamination to the payload below. Besides cleanliness, the frictionless design eliminates the need for mechanical bearing maintenance/lubrication.

Specifications

Technical Specs

Bearings

Vacuum/pressure air bearing
Drive Type

Ironcore linear motor
Maximum Acceleration

2 G
Maximum Speed

2.5 m/s
On-Axis Accuracy

± 0.5 µm

Pitch

20 µrad
Roll

20 µrad
Yaw

20 µrad
Travel Range

1200 mm

Bearings

Vacuum/pressure air bearing
Drive Type

Ironcore linear motor
Maximum Acceleration

2 G
Maximum Speed

2.5 m/s
On-Axis Accuracy

± 0.5 µm

Pitch

20 µrad
Roll

20 µrad
Yaw

20 µrad
Travel Range

1200 mm

Resources & Downloads

Literature

Air Bearing Positioning System Brochure (4.3 MB, PDF)

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