HybrYX Hybrid Air Bearing Stage

Hybrid Air Bearing Stage, Single Plane XY

Model: HybrYX

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Product Series Overview

HybrYX^TM XY Hybrid Air Bearing Stage

The HybrYX^TM is a single plane XY hybrid air-bearing stage offers the advantages of a single plane air bearing stage at a much lower cost. HybrYX is well suited for semiconductor wafer inspection systems as well as being an excellent choice for use in large substrate (flat panel display and photovoltaic panel) inspection and processing tools.

Specifications

Technical Specs

Pitch

15 µrad
Surface Flatness

0.6 µm
Travel Range

350 mm

Travel Range Y

650 mm

Pitch

15 µrad
Surface Flatness

0.6 µm
Travel Range

350 mm

Travel Range Y

650 mm

Resources & Downloads

Literature

Air Bearing Positioning System Brochure (4.3 MB, PDF)

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