Air Bearing Stage, Wafer Positioning, DynamYX® 300

Technical Specs

  • Bearings
    Vacuum/pressure air bearing
  • Drive Type
    Ironless linear motor
  • Maximum Speed
    400 mm/s  
  • Weight
    550 kg  
  • Resolution
    2 nm  
  • Travel, X
    96 mm  
  • Travel, Y
    340 mm  

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