Air Bearing Stage, Wafer Positioning, DynamYX^® 300

The DynamYX^® 300 wafer positioning air bearing stage features a simple, 3-piece architecture in a two motor design that provides a cost effective solution for high accuracy and dynamic performance for step-and-settle and/or scanning applications. It has the smallest footprint in Newport’s line of air bearing wafer positioning stages and is designed for 300 mm wafer test, measurement, and processing applications.