DYNAMYX300 Air Bearing Stage

Air Bearing Stage, Wafer Positioning, DynamYX^® 300

Model: DYNAMYX300

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Product Series Overview

DynamYX^® 300 Wafer Positioning Stage

The DynamYX^® 300 Wafer Positioning Stage features a simple, 3-piece architecture in a two motor design that provides a cost effective solution for high accuracy and dynamic performance for step-and-settle and/or scanning applications. It has the smallest footprint in Newport’s line of air bearing wafer positioning stages and is designed for 300 mm wafer test, measurement, and processing applications.

Specifications

Technical Specs

Bearings

Vacuum/pressure air bearing
Drive Type

Ironless linear motor
Maximum Speed

400 mm/s
Weight

550 kg

Resolution

2 nm
Travel, X

96 mm
Travel, Y

340 mm

Bearings

Vacuum/pressure air bearing
Drive Type

Ironless linear motor
Maximum Speed

400 mm/s
Weight

550 kg

Resolution

2 nm
Travel, X

96 mm
Travel, Y

340 mm

Resources & Downloads

Literature

Air Bearing Positioning System Brochure (4.3 MB, PDF)

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Product Comparison

Air Bearing Stage, Wafer Positioning, DynamYX® 300