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Air Bearing Multi-Axis Systems

DynamYX was designed to provide equipment manufacturers with a tool capable of achieving the highest levels of precision and throughput. DynamYX provides high resolution dynamic positioning of a wafer chuck or other similar substrate in two orthogonal translation axes from a single-plane carriage.

Air Bearing Multi-Axis Systems

DynamYX was designed to provide equipment manufacturers with a tool capable of achieving the highest levels of precision and throughput. DynamYX provides high resolution dynamic positioning of a wafer chuck or other similar substrate in two orthogonal translation axes from a single-plane carriage.

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DynamYX^® Datum^® Ultra-High Performance Stage

DynamYX^® Datum^® Ultra-High Performance Stage

DynamYX^® GT High-Throughput Stage

DynamYX^® GT High-Throughput Stage

DynamYX^® 300 Wafer Positioning Stage

DynamYX^® 300 Wafer Positioning Stage

DYNAMYX-RS - Air Bearing Stage, Reticle Positioning, DynamYX^® RS

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DYNAMYX-RS-Air Bearing Stage, Reticle Positioning, DynamYX^® RS