SinguLYS-S-370 Air Bearing Stage

Air Bearing Stage, SinguLYS S-370

Model: SinguLYS-S-370

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Product Series Overview

SinguLYS - Single Axis Air Bearing Stage

Newport's SinguLYS S-Series stage features ceramic components similar to those found in the DynamYX^® and HybrYX^TM families. The light-weight carriage with integrated pressure-vacuum elements is guided by a precisely lapped ceramic (L-shape) body. The rigidity and compact footprint of the SiC body allows this high-precision stage to be used in tight spaces typically reserved for mechanical bearing designs. The S-370 is perfect for applications with very high duty-cycles and require low pitch/yaw, tight velocity regulation and high cleanliness.

Specifications

Technical Specs

Bearings

Vacuum/pressure air bearing
Maximum Acceleration

0.5 G
Maximum Speed

500 mm/s
Minimum Incremental Motion

10 nm
On-Axis Accuracy

± 0.1 µm

Pitch

10 µrad
Roll

10 µrad
Yaw

10 µrad
Travel Range

370 mm

Bearings

Vacuum/pressure air bearing
Maximum Acceleration

0.5 G
Maximum Speed

500 mm/s
Minimum Incremental Motion

10 nm
On-Axis Accuracy

± 0.1 µm

Pitch

10 µrad
Roll

10 µrad
Yaw

10 µrad
Travel Range

370 mm

Resources & Downloads

Literature

Air Bearing Positioning System Brochure (4.3 MB, PDF)

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