Air Bearing Stage, SinguLYS S-370

Newport's SinguLYS S-Series stage features ceramic components similar to those found in the DynamYX^® and HybrYX^TM families. The light-weight carriage with integrated pressure-vacuum elements is guided by a precisely lapped ceramic (L-shape) body. The rigidity and compact footprint of the SiC body allows this high-precision stage to be used in tight spaces typically reserved for mechanical bearing designs. The S-370 is perfect for applications with very high duty-cycles and require low pitch/yaw, tight velocity regulation and high cleanliness.