Air Bearing Stage, SinguLYS S-370

Specifications

  • Bearings
    Vacuum/pressure air bearing
  • Maximum Acceleration
    0.5 G
  • Maximum Speed
    500 mm/s
  • Minimum Incremental Motion
    10 nm
  • On-Axis Accuracy
    ± 0.1 µm
  • Pitch
    10 µrad
  • Roll
    10 µrad
  • Yaw
    10 µrad
  • Travel Range
    370 mm

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