Wafer Positioning Stage, Integrated Vertical and Stepper Rotation Stage

ZVR Integrated Stepper Motor Vertical and Rotation Stage

Newport’s new ZVR-PP is an integrated Z-vertical and Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR-PP offers precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design. The low mass and high natural frequency of the ZVR-PP, provides a platform for rapid step-and-settle applications. With integrated vacuum and electrical lines accessed at a single point, and a three point mounting interface, the ZVR-PP offers convenient, stable, and high performance capability for applications such as wafer positioning. Please refer to the datasheet for full specifications on the ZVR-PP.Please refer to the datasheet for the complete specifications on the rotational and vertical motion capabilities of the ZVR-PP.

Specifications

Technical Specs

Travel Range
10 mm
Angular Range
360°
Maximum Speed
40°/s
Maximum Linear Speed
10 mm/s
Minimum Incremental Motion
0.2 mdeg
Minimum Incremental Motion, Linear
0.05 µm
Maximum Torque
1 N·m
Centered Load Capacity
100 N
Uni-directional Repeatability, Typical
Rotary: ±1.0 mdeg - Linear: ±0.2 µm
Uni-directional Repeatability, Guaranteed
Rotary: ±1.5 mdeg - Linear: ±1.0 µm
Bi-directional Repeatability, Typical
±3.0 mdeg
Bi-directional Repeatability, Guaranteed
±6.0 mdeg
Bi-directional Repeatability, Linear
±1.2 (typical) ±2.0 (guaranteed) µm
Accuracy, Typical
Rotary: ±10 mdeg - Linear: ±0.5 µm

Accuracy, Guaranteed
Rotary: ±17 mdeg - Linear: ±2.0 µm
Wobble, Typical
±22 µrad
Wobble, Guaranteed
±40 µrad
Eccentricity, Typical
±2.2 µm
Eccentricity, Guaranteed
±4.0 µm
Origin Repeatability
Rotary: ±20 mdeg
Linear :±2.5 µm
MTBF
20,000 h (25% load, 10% duty cycle)
Cable Length
3 m
Aperture Diameter
50 mm
Thread Type
M4
Weight
4.2 kg
Compliance
RoHS 3, CE

Travel Range
10 mm
Angular Range
360°
Maximum Speed
40°/s
Maximum Linear Speed
10 mm/s
Minimum Incremental Motion
0.2 mdeg
Minimum Incremental Motion, Linear
0.05 µm
Maximum Torque
1 N·m
Centered Load Capacity
100 N
Uni-directional Repeatability, Typical
Rotary: ±1.0 mdeg - Linear: ±0.2 µm
Uni-directional Repeatability, Guaranteed
Rotary: ±1.5 mdeg - Linear: ±1.0 µm
Bi-directional Repeatability, Typical
±3.0 mdeg
Bi-directional Repeatability, Guaranteed
±6.0 mdeg
Bi-directional Repeatability, Linear
±1.2 (typical) ±2.0 (guaranteed) µm
Accuracy, Typical
Rotary: ±10 mdeg - Linear: ±0.5 µm

Accuracy, Guaranteed
Rotary: ±17 mdeg - Linear: ±2.0 µm
Wobble, Typical
±22 µrad
Wobble, Guaranteed
±40 µrad
Eccentricity, Typical
±2.2 µm
Eccentricity, Guaranteed
±4.0 µm
Origin Repeatability
Rotary: ±20 mdeg
Linear :±2.5 µm
MTBF
20,000 h (25% load, 10% duty cycle)
Cable Length
3 m
Aperture Diameter
50 mm
Thread Type
M4
Weight
4.2 kg
Compliance
RoHS 3, CE

Resources & Downloads

2D Product Drawings

ZVR-PP.pdf(576.3 kB, PDF)

Literature

ZVR Data Sheet(1.6 MB, PDF)

Manuals

ZVR User's Manual.pdf(2.6 MB, PDF)

Related Products

Compatible Controllers

Based on axis required, choose a specific controller to pair with the stage. Along with an XPS-D or XPS-RLD controller, a driver module is required.

Description	Compatibility	Avail.	Price
xps-d-universal-motion-controller¹XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver	UNIVERSAL
xps-rl-universal-high-performance-motion-controller²XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver	UNIVERSAL
esp301-3-axis-dc-and-stepper-motion-controllerESP302 3-Axis DC and Stepper Motion Controller	UNIVERSAL
SMC100PP³Motion Controller, Single-axis Stepper Motor	UNIVERSAL	In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$1,452