Integrated Vertical and Rotation Stepper Motor Stage for Wafer Positioning

The ZVR stage integrates 10 mm of vertical (Z-axis) and 360° of continuous rotary (ϴ-axis) positioning with a unique three-point drive and bearing design. It is designed primarily to precisely elevate and rotate 200- and/or 300-mm wafer chucks and other samples or objects requiring adjustments to align the object's orientation or to focus. The stepper motors used in this stage are a lower cost alternative to DC servo systems for less demanding applications. Run open-loop, pulse count is a good indicator of position.

Three-point bottom interface for stable mounting to any XY stage or other platform
Large center aperture simplifies vacuum and electrical cable management
Low mass and a high natural frequency enable rapid step-and-settle applications
Stainless steel recirculating ball bearings
Plug and Play – ESP compatible
Lower cost alternative to DC servo systems

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Compatibility:

	Compare	Description	Compatibility	Drawings, CAD & Specs	Angular Range	Maximum Speed	Minimum Incremental Motion	Bi-directional Repeatability, Typical	Centered Load Capacity	Avail.	Price
		ZVR-PPWafer Positioning Stage, Integrated Vertical and Stepper Rotation Stage	METRIC		360°	40°/s	0.2 mdeg	±3.0 mdeg	100 N	Contact Us

Notes:

DC Motor for ϴ-axis version is also available.

Compatible Controllers

Compatible motion controllers for this stepper motor driven stage are:

XPS-RLD Motion Controller ( or Axis): Requires an Driver Module.
XPS-D Motion Controller (, , or Axis): Requires an Driver Module.
ESP302 Motion Controller (, , or Axis): Plug and Play compatible with ESP302 Motion Controller.
Single Axis Motion Controller: 0.25 µm MIM for Z-axis and 1.0 mdeg for ϴ-axis when used with SMC100PP.

Features

Payload Design

The ZVR rigidly supports and drives the payload at three points (separated by 120 degrees) along the outer circumference of the stage. Ordinary designs use a single cam, wedge, or screw located at the center of the stage. Newport’s three point design with an inline guide and drive, has advantages for applications that have slight to extreme unbalanced loading such as wafer probing, which can have vertical forces applied at locations along the outer edges of the chuck. Angular deflections due to these off-center loads are minimized and binding during vertical motion is eliminated.

Open Aperture

An important feature of the ZVR's unique design includes a 50mm clear aperture through the center of the rotation stage to allow for cables, lines and other utilities.

Economical Stepper Motor

The stepper motor version is a more economical version for less demanding applications. Instead of encoder feedback, a stepper motor reaches a position by the number of commanded steps. An advantage of stepper motors is that full torque is still provided even when idle. The ZVR stages are ESP-compatible, allowing the user to take advantage of Newport's smart-stage features when used with Newport controllers.

Adjustable Limit Switch and Origin Reference

The ZVR Series features an upper limit switch with a 4-mm adjustment range enabling the user to set the upper limit of travel. These stages are also equipped with a hardware origin that serves as an absolute reference (home) position.

Metrology Report Included at No Additional Cost

Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.

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