Motorized XYZ Linear Stage, 25 mm Travel, 100 nm MIM, DC Servo, Tachometer

Technical Specs

  • Motorized Axes
    XYZ
  • Orientation
    Right-Handed
  • Travel Range
    25 mm
  • Maximum Speed
    25 mm/s
  • Minimum Incremental Motion
    100 nm
  • Centered Load Capacity
    35 N
  • Axial Load Capacity (+Cx)
    40 N
  • Inverse Axial Load Capacity (-Cx)
    -40 N
  • Special Features
    Right Handed
  • Accuracy, Typical
    ±0.4 µm
  • Accuracy, Guaranteed
    ±1.0 µm
  • Bi-directional Repeatability, Typical
    ±0.06 µm
  • Bi-directional Repeatability, Guaranteed
    ±0.10 µm
  • Pitch, Typical
    ±22 µrad
  • Pitch, Guaranteed
    ±50 µrad
  • Compliance in Pitch
    20 µrad/Nm  
  • Yaw, Typical
    ±17 µrad
  • Yaw, Guaranteed
    ±50 µrad
  • Compliance in Yaw
    30 µrad/Nm  
  • Compliance in Roll
    20 µrad/Nm  
  • Drive Type
    DC Servo with Tachometer
  • Drive Screw Pitch
    1 mm  
  • Feedback
    Rotary Encoder
  • Encoder Resolution
    0.1 µm
  • Limit Switches
    Optical
  • Origin
    Optical, centered
  • Origin Repeatability
    ±0.1 µm
  • Cable Length
    1.5m  
  • Connector Type
    DB25 Male (3)
  • Thread Type
    4-40, 8-32 and 1/4-20
  • Weight
    5 kg  
  • MTBF
    20,000 h (25% load, 30% duty cycle)
  • RoHS
    Compliant
  • Maximum Power Consumption
    30 W
  • Compatible XPS-RL Driver Module
  • Compatible XPS-D Driver Module
  • ESP301 Compatibility
    Yes
  • SMC100 Compatibility
  • Travel Requirement
    Less Than 50 mm
  • MIM Requirement
    100 to 500 nm
  • Speed Requirement
    Less than 50 mm/s
  • Load Capacity Requirement
    Less than 100 N