Motorized Actuator, Miniature, 6 mm Travel, Vacuum Compatible

Specifications

  • Travel Range
    6 mm
  • Maximum Speed
    0.2 mm/s  
  • Minimum Incremental Motion
    0.10 µm
  • Push Force
    30 N
  • Accuracy, Typical
    ±1.5 µm
  • Accuracy, Guaranteed
    ±3.0 µm
  • Bi-directional Repeatability, Typical
    ±0.15 µm
  • Bi-directional Repeatability, Guaranteed
    ±1.25 µm
  • Uni-directional Repeatability, Typical
    ±0.10 µm
  • Uni-directional Repeatability, Guaranteed
    ±0.50 µm
  • Drive Screw Pitch
    0.5 mm  
  • Reduction Gear
    1:256
  • Origin
    Optical, at lower limit
  • Origin Repeatability
    ±2 µm
  • Limit Switches
    Optical switches, both ends
  • Cable Length
    3 m  
  • Connector Type
    DB25 - Male
  • Vacuum Compatibility
    10-6 Torr
  • Power Consumption
    5 W  
  • Weight
    0.33 kg  
  • MTBF
    10000 h (25N load, 10% duty cycle)
  • Maximum Power Consumption
    10 W
  • Compliance
    RoHS 3, CE

Resources & Downloads

Certificates
2D Product Drawings

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Notes:
  1. Requires XPS-DRV11 driver module
  2. Requires XPS-DRV11 driver module

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