Metrology Linear Stage, 200 mm, Stepper Motor, M6

Technical Specs

  • Travel Range
    200 mm
  • Maximum Speed
    20 mm/s
  • Minimum Incremental Motion
    100 nm
  • Centered Load Capacity
    150 N
  • Axial Load Capacity (+Cx)
    30 N
  • Inverse Axial Load Capacity (-Cx)
    -30 N
  • Accuracy, Typical
    ±2.0 µm
  • Accuracy, Guaranteed
    ±5.0 µm
  • Uni-directional Repeatability, Typical
    ±0.35 µm
  • Uni-directional Repeatability, Guaranteed
    ±0.75 µm
  • Bi-directional Repeatability, Typical
    ±1.3 µm
  • Bi-directional Repeatability, Guaranteed
    ±2.25 µm
  • Flatness, Typical
    ±0.50 µm
  • Flatness, Guaranteed
    ±1.50 µm
  • Straightness, Typical
    ±0.50 µm
  • Straightness, Guaranteed
    ±1.50) µm
  • Pitch, Typical
    ±20 µrad
  • Pitch, Guaranteed
    ±50 µrad
  • Compliance in Pitch
    2 µrad/Nm  
  • Yaw, Typical
    ±5.0 µrad
  • Yaw, Guaranteed
    ±15 µrad
  • Compliance in Yaw
    2 µrad/Nm  
  • Compliance in Roll
    3 µrad/Nm  
  • Drive Type
    Stepper Motor
  • Feedback
    No
  • Origin Repeatability
    ±2.5 µm
  • Cable Length
    3 m  
  • Thread Type
    M6
  • Weight
    7.7 kg  
  • MTBF
    20,000 h (25% load, 30% duty cycle)
  • RoHS
    Compliant
  • Maximum Power Consumption
    50 W
  • Compatible XPS-RL Driver Module
  • Compatible XPS-D Driver Module
  • ESP301 Compatibility
    Yes
  • SMC100 Compatibility