Compare Model Drawings, CAD & Specs Availability Price
Motorized Linear Stage, Metrology, 100 mm Travel, DC Motor
$6,404
In Stock
In Stock
Motorized Linear Stage, Metrology, 100 mm Travel, Stepper Motor
$5,870
In Stock
In Stock
Motorized Linear Stage, Metrology, High Accuracy, 100 mm, Stepper
$8,639
In Stock
In Stock
Motorized Linear Stage, Metrology, 200 mm Travel, DC Motor
$7,006
Motorized Linear Stage, Metrology, 200 mm Travel, Stepper Motor
$6,164
Motorized Linear Stage, Metrology, High Accuracy, 200 mm, Stepper
$8,911
Motorized Linear Stage, Metrology, 300 mm Travel, DC Motor
$8,164
Motorized Linear Stage, Metrology, 300 mm Travel, Stepper Motor
$7,630
Motorized Linear Stage, Metrology, High Accuracy, 300 mm, Stepper
$10,516
In Stock
In Stock

Specifications

Features

All Steel Body

The all steel construction allows for extreme stiffness and thermal stability, by eliminating bi-metallic bending. Due to the hardness of steel, it can be machined flatter to give excellent trajectory.

Anti-creep Crossed Roller Bearings

To ensure the most accurate trajectory control, FMS stages feature matched pairs of best-in-class anti-creep crossed roller bearings. The absence of recirculating elements in these bearings leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. Moreover, the geared retainers prevent bearing cage migration, which can occur with other linear bearing products.

Plug and Play - ESP Compatible

The FMS is an ESP-compatible stage wherein when connected to a Newport controller, it is quickly recognized and its operating parameters are configured without the need for user input, facilitating the startup and usability of the FMS. This Plug and Play feature is not only transparent to the use, but it also ensures the safe operation of the stage.

Precision Ground Ball Screw

The ground ball screw is made for higher speed motion and enables higher throughput capability over the long life of the FMS.

Metrology Report Included at No Additional Cost

Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.

FMS Stage Load Characteristics