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FMS Series Metrology Application Stepper Motor Linear Translation Stages
FMS Series Metrology Application Stepper Motor Linear Translation Stages
The FMS Series metrology application linear translation stages are the highest performing all-steel linear stage providing high stiffness and thermal stability. With its high straightness and flatness, it is ideally suited for sensitive metrology applications.
- All steel build for high stiffness, thermal stability & repeatable positioning
- Anti-creep crossed roller bearings for exceptional straight & smooth motion
- Engineered for demanding applications of surface measurement & profilometry
- Linear encoder & precision ground ball screw for high accuracy & repeatability
- Plug and Play - ESP compatible See All Features
Specifications
Features
All Steel Body
The all steel construction allows for extreme stiffness and thermal stability, by eliminating bi-metallic bending. Due to the hardness of steel, it can be machined flatter to give excellent trajectory.
Backlash-free Precision Ground Ballscrew
These motorized linear stages include a preloaded, backlash-free, precision ground ball screw, which provides smooth, rapid motion with short step and settling time. The screw profile is designed to reduce heating effects, extending the life of the stage.
Anti-creep Crossed Roller Bearings
To ensure the most accurate trajectory control, FMS stages feature matched pairs of best-in-class anti-creep crossed roller bearings. The absence of recirculating elements in these bearings leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. Moreover, the geared retainers prevent bearing cage migration, which can occur with other linear bearing products.
Plug and Play - ESP Compatible
The FMS is an ESP-compatible stage wherein when connected to a Newport controller, it is quickly recognized and its operating parameters are configured without the need for user input, facilitating the startup and usability of the FMS. This Plug and Play feature is not only transparent to the use, but it also ensures the safe operation of the stage.
Individual Stage Metrology Report is Included
Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.
FMS Stage Load Characteristics
Resources
Manuals
FMS Stages User's Manual(1.5 MB, PDF)
