Nanopositioning Piezo Stage Guide

Overview

Newport provides a variety of nanopositioner solutions that are ideal devices for providing exceptional nanometer scale remote control for manual positioning stages and opto-mechanical components over large distances, hard-to-reach spaces and hazardous hands-off applications. Our exclusive design and our innovative piezo based technology allows a range of motion and stability that ensures nanometer scale of motion with minimal to no backlash. The short list of applications of our nanopositioner solutions include: metrology, remote and automated beam steering, micropositioning, microscopy, wafer inspection, telecom components alignment, flow cytometry, and many more.

Crossed-Roller Bearing Piezo Stages

Description	Features
Super Agilis™ Piezo Linear Stages With CONEX™ Controller	High speed 10 mm per second travel Direct mounting without additional baseplate Lifetime >10 km 100 nm or 25 nm (closed-loop) Minimum Incremental Motion	Super Agilis™ Piezo Linear Stages With CONEX™ Controller
0.5 in. Travel Crossed-Roller Bearing Piezo Stages	Crossed-roller-bearing design for smooth and accurate positioning 0.5 inch (12.7 mm) Picomotor or micrometer travel Easy-to-use, flexible controllers and drivers True set-and-forget long-term stability	0.5 in. Travel Crossed-Roller Bearing Piezo Stages
1.0 in. Travel Crossed-Roller Bearing Piezo Linear Stages	Crossed-roller-bearing design for smooth and accurate positioning 1.0 inch (25.4 mm) Picomotor or micrometer travel Easy-to-use, flexible controllers and drivers True set-and-forget long-term stability	1.0 in. Travel Crossed-Roller Bearing Piezo Linear Stages
Optically Encoded Piezo Linear Stages	Integrated linear optical encoder with 80 nm resolution Crossed-roller bearing design for smooth & accurate positioning Easily integrated with Picomotor™ actuators	Optically Encoded Piezo Linear Stages

Single-Row Bearing Piezo Stages

Description	Features
Agilis™ Piezo Motor Linear Stages	Small minimum incremental motion Set-and-forget stability when not in use Ripple-free with low friction travel Available with direct read encoder and CONEX controller	Agilis™ Piezo Motor Linear Stages
Agilis™ Piezo Linear Stage With CONEX™ Controller	Closed-loop positioning performance at an affordable price Integrated single-axis control for Agilis piezo motor products Ultra-compact controller and stage with 27 mm travel range Repeatable, sub-micron motion	Agilis™ Piezo Linear Stage With CONEX™ Controller
0.5 in. Travel Ball Bearing Piezo Linear Stages	12.7 mm travel with 39.4 x 39.4 mm mounting platform Flexible and adaptable modular design Aluminum single-row ball-bearing design Easy-to-use, flexible controllers and drivers	0.5 in. Travel Ball Bearing Piezo Linear Stages
1.0 in. Travel Ball Bearing Piezo Linear Stages	25.4 mm travel with 63.5 x 63.5 mm mounting platform Flexible and adaptable modular design < 30 nm Resolution Set-and-forget long-term stability	1.0 in. Travel Ball Bearing Piezo Linear Stages

Gothic Arch Bearing Piezo Stages

Description	Features
5 mm Travel Gothic-Arch Bearing Piezo Linear Stages	Preconfigured stages with picomotor or micrometer actuators Bearing ways machined directly into stage body for maximum stability Gothic bearing profile extends contact area maximizing load capacity and smoothness Optimally maintains preloaded bearing force	5 mm Travel Gothic-Arch Bearing Piezo Linear Stages
0.5 in. Travel Gothic-Arch Bearing Piezo Linear Stages	Preconfigured stages with picomotor or micrometer actuators Bearing ways machined directly into stage body for maximum stability Gothic bearing profile extends contact area maximizing load capacity and smoothness Optimally maintains preloaded bearing force	0.5 in. Travel Gothic-Arch Bearing Piezo Linear Stages
1.0 in. Travel Gothic-Arch Bearing Piezo Linear Stages	Preconfigured stages with picomotor or micrometer actuators Bearing ways machined directly into stage body for maximum stability Gothic bearing profile extends contact area maximizing load capacity and smoothness Optimally maintains preloaded bearing force	1.0 in. Travel Gothic-Arch Bearing Piezo Linear Stages

Piezo Stack Linear Stages

	Description	Features
	Piezo Stack Nanopositioning Linear Stages	Sub-nanometer piezoelectric positioning resolution Motion in X, XY, or XYZ Piezoelectric travel range of up to 400 µm Optional integrated strain-gauge for closed-loop operation		Piezo Stack Nanopositioning Linear Stages
	Vacuum Piezo Stack Linear Stages	Sub-nanometer piezoelectric positioning resolution 10^-6 Torr vacuum compatibility X, XY, or XYZ stages with up to 400 µm travel High resonant frequency for high dynamic applications		Vacuum Piezo Stack Linear Stages