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Hybrid Air Bearing Stage, Single Plane XY, Large Payloads


  • Travel Range
    350 mm
  • Travel Range Y
    650 mm


Innovative Architecture

HybrYX stages blend the cost-effectiveness of mechanical bearings with the precision of a single plane air bearing carriage to deliver a powerful combination of throughput, precision and value. During motion, a ceramic carriage freely slides in X and Y on a precision lapped granite reference plane using a proprietary pressure-vacuum air bearing design. This XY carriage is pressure-vacuum preloaded to, and guided along the Y-axis by a rigid and lightweight ceramic beam. The beam is supported (and guided) at each end by recirculating ball bearing carriages resulting in a low-profile design that is extremely rigid, well-damped, and capable of quick & precise point-to-point moves and exceptional high-speed scanning performance. For large payloads, such as Generation-5 LCD display or Photovoltaic panels, the HybrYX-G5 offers an oversized carriage with higher air bearing load capacity on both the horizontal and vertical reference surfaces.

Performance without Compromise

HybrYX was developed to overcome the disadvantages found in conventional "stacked" XY stage systems. Truck-and-rail based stages have limited performance capabilities, long-travel crossed roller bearing designs are hindered by large footprints and may not have adequate life-time or MTBF characteristics, and a (pure) dual axis air bearing is often cost prohibitive.

Unique Benefits

  • Excellent price-to-performance value for demanding industrial OEM applications
  • Ideal choice for scanning applications requiring ultra-low velocity ripple and dynamic following error
  • True single place XY architecture with optional theta and Z-Tip-Tilt solutions
  • Reliable, long-life operation well suited for high duty cycle environments
  • Large (>1 meter) XY Travel range
  • Scanning velocities up to 600mm/sec and 0.6G acceleration

Wide Range of Substrate Positioning Applications

  • PCB Patterning
  • Automated Optical Inspection
  • Array Checking
  • Array Repair
  • Color Filter Generation
  • Edge Isolation
  • Scribing
  • Fiducial and Barcode Generation
  • Wave Guide Direct Writing
  • Optical Calibration