Motorized Rotation Stage, High Speed, High Accuracy, Low Profile
Motorized Rotation Stage, High Speed, High Accuracy, Low Profile
Model: RGA150MAP
10 Weeks
Product Series Overview
RGA Low Profile Large Aperture Direct Drive Rotation StagesThe RGA150MAP low-profile, large aperture and high accuracy rotary stage addresses the need for quick angle adjustments of wafers and vacuum chucks. Although specifically tailored to semiconductor applications, the RGA150MAP can also be utilized in other industrial applications, such as through hole imaging/inspection or laser processing, automation or any general positioning application that requires fast positioning .
This is the mapped version of RGA150 that allows to achieve ±1mdeg accuracy.
Specifications
- Angular Range360°
- Maximum Speed1800°/s
- Minimum Incremental Motion0.01 mdeg
- Peak Motor Torque11 Nm
- Centered Load Capacity50 N
- Bi-directional Repeatability, Typical±0.0975 mdeg
- Accuracy, Guaranteed±1 mdeg
- Wobble, Typical±12 µrad
- Wobble, Guaranteed±26 µrad
- Eccentricity, Typical±0.5 µm
- Eccentricity, Guaranteed±1 µm
- MTBF20,000 hours @ 30 % duty cycle
- Cable Length5 m
- Aperture Diameter90 mm
- Weight4.5 kg
- ComplianceRoHS 3, CE, UKCA
Resources & Downloads
2D Product Drawings
RGA150 DWG.pdf(695.8 kB, PDF)
Literature
RGA150 Direct Drive Rotation Stage Datasheet(2.1 MB, PDF)
Other
RGA UKCA Declaration of Conformity.pdf(67 kB, PDF)
Technical Notes
Methods to Determine Optimized Scaling Acceleration(3.4 MB, PDF)
Manuals
RGA150 Rotation Stage User Manual(4.5 MB, PDF)
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