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Hybrid Air Bearing Stage, Single Plane XY, Large Payloads

Hybrid Air Bearing Stage, Single Plane XY, Large Payloads

Model: HybrYX-G5

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Product Series Overview

HybrYX G5 Large Substrate Positioning Stage

The HybrYX^TMsingle plane XY hybrid air-bearing stage offers the advantages of a single plane air bearing stage at a much lower cost. The HybrYX-G5 provides the advantages of a single plane architecture in a stage designed specifically for large payloads.

Specifications

Technical Specs

Travel Range

350 mm
Travel Range Y

650 mm

Travel Range

350 mm
Travel Range Y

650 mm

Resources & Downloads

Literature

Air Bearing Positioning System Brochure (4.3 MB, PDF)

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