Motorized Linear Stage, Steel, Stepper Motor, 100 mm Travel, Vacuum, M4 & M6

Technical Specs

  • Travel Range
    100 mm
  • Maximum Speed
    20 mm/s
  • Minimum Incremental Motion
    400 nm
  • Centered Load Capacity
    1000 N
  • Axial Load Capacity (+Cx)
    100 N
  • Inverse Axial Load Capacity (-Cx)
    -21 N
  • Accuracy, Typical
    ±1.5 µm
  • Accuracy, Guaranteed
    ±2.5 µm
  • Uni-directional Repeatability, Typical
    ±0.30 µm
  • Uni-directional Repeatability, Guaranteed
    ±0.75 µm
  • Bi-directional Repeatability, Typical
    ±2.25 µm
  • Bi-directional Repeatability, Guaranteed
    ±2.75 µm
  • Pitch, Typical
    ±10 µrad
  • Pitch, Guaranteed
    ±20 µrad
  • Compliance in Pitch
    6 µrad/Nm  
  • Yaw, Typical
    ±10 µrad
  • Yaw, Guaranteed
    ±17 µrad
  • Compliance in Yaw
    5 µrad/Nm  
  • Compliance in Roll
    4 µrad/Nm  
  • Drive Type
    Stepper Motor
  • Origin Repeatability
    ±5 µm
  • Cable Length
    3 m  
  • Vacuum Compatibility
    10-6 hPa
  • Thread Type
    M4 and M6
  • Weight
    14.2 kg  
  • MTBF
    20,000 h (25% load, 10% duty cycle)
  • RoHS
    Compliant
  • Maximum Power Consumption
    10 W
  • Compatible XPS-RL Driver Module
  • Compatible XPS-D Driver Module
  • ESP301 Compatibility
    Yes