Motorized Linear Stage, Steel, Stepper Motor, 100 mm Travel, Vacuum, M4 & M6

Specifications

  • Travel Range
    100 mm
  • Maximum Speed
    20 mm/s
  • Minimum Incremental Motion
    400 nm
  • Centered Load Capacity
    1000 N
  • Axial Load Capacity (+Cx)
    100 N
  • Inverse Axial Load Capacity (-Cx)
    -21 N
  • Accuracy, Typical
    ±1.5 µm
  • Accuracy, Guaranteed
    ±2.5 µm
  • Uni-directional Repeatability, Typical
    ±0.30 µm
  • Uni-directional Repeatability, Guaranteed
    ±0.75 µm
  • Bi-directional Repeatability, Typical
    ±2.25 µm
  • Bi-directional Repeatability, Guaranteed
    ±2.75 µm
  • Pitch, Typical
    ±10 µrad
  • Pitch, Guaranteed
    ±20 µrad
  • Compliance in Pitch
    6 µrad/Nm  
  • Yaw, Typical
    ±10 µrad
  • Yaw, Guaranteed
    ±17 µrad
  • Compliance in Yaw
    5 µrad/Nm  
  • Compliance in Roll
    4 µrad/Nm  
  • Drive Type
    Stepper Motor
  • Origin Repeatability
    ±5 µm
  • Cable Length
    3 m  
  • Vacuum Compatibility
    10-6 Torr
  • Thread Type
    M4 and M6
  • Weight
    14.2 kg  
  • MTBF
    20,000 h (25% load, 10% duty cycle)
  • Maximum Power Consumption
    10 W
  • Compliance
    RoHS 3, CE
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Resources & Downloads

3D Product Models
2D Product Drawings
Manuals
Literature

Related Products

Compatible Controllers

Based on axis required, choose a specific controller to pair with the stage. Along with an XPS-D or XPS-RLD controller, a driver module is required.
Compare Description Drawings, CAD & Specs Avail. Price
XPS-D Universal High-Performance 1-8 Axis Motion Controller and DriverXPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver1XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver
XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and DriverXPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver2XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver
ESP302 3-Axis Motion Controller and DriverESP302 3-Axis DC and Stepper Motion ControllerESP302 3-Axis DC and Stepper Motion Controller
Notes:
  1. Requires XPS-DRV11 driver module
  2. Requires XPS-DRV11 driver module

Similar Stages

Compare Description Drawings, CAD & Specs Avail. Price
MTN High Load Steel Stepper Motor Linear StagesMTN200PPV6Motorized Linear Stage, Steel, Stepper Motor, 200 mm Travel, Vacuum, M4 & M6$17,073
MTN High Load Steel Stepper Motor Linear StagesMTN300PPV6Motorized Linear Stage, Steel, Stepper Motor, 300 mm Travel, Vacuum, M4 & M6$18,108