Piezo Mirror Mount, 1.0 in., Limit Switches, Vacuum Compatible

The Agilis proprietary piezo technology provides 50 nm incremental motion capability, translating to resolutions as small as 1 µrad, making them ideal for ultra-sensitive alignments and optical adjustments.

The AG-M050L(V6) and AG-M100L(V6) mounts include precision electrical limit switches for repeatable absolute positioning without the need for encoder feedback. This is accomplished by measuring the average step size from the left to the right travel limits and vice-versa. Under constant conditions, the step size is fairly repeatable. Additionally, these limit switches serve as a safety feature.

The Agilis piezo motors are directly coupled to the moving optics holder for robust and predictable performance. When idle, the motor spring force locks the mirror in place, providing true set and forget stability. Agilis mounts also have a fast adjustment speed and are free of issues associated with backlash or hysteresis.