Motorized XYZθxθy Tilt Aligner, Ultra High Vacuum, M6

The 8081M-UHV XYZTxTy Motorized Five-Axis Tilt Aligner which increases the utility of our popular kinematic stages by motorizing each of the axes can now be used in UHV environments (10^-9 Torr) as well as for VUV/EUV applications. The Picomotor™ actuators to each stage allows the same better than <30 nm remote high-resolution adjustment of various combinations of X, Y, Z, Tx, and Ty. With its minimal backlash, it is excellent for long term stability and high stiffness. The 8081-UHV has been tested and measured to outgas levels less than 5ppm of volatile mass at 85 °C over three hours. Mass Spectrograms detailing the exact outgassing compounds are available upon request. M4 and M6 tapped holes. Use with one 8081-UHV-C cable, two 8725 multi axis adapters and two 8742 controller/drivers to control all 5 axes.