Motorized XYZθxθy Tilt Aligner, Ultra High Vacuum, M6

Technical Specs

  • Axes of Travel
    X, Y, Z, θx, θy
  • Mechanism
    Kinematic
  • Drive Type
    Picomotor
  • Travel Range
    3 mm  
  • Angular Range
    θx=8°, θy=10°
  • Load Capacity
    13 N  
  • Minimum Incremental Motion
    <30 nm
  • Angular Resolution
    θx, θy≤0.7 µrad
  • Vacuum Compatibility
    10-9 Torr
  • Wire Type
    Kapton® Ribbon Ultrahigh Vacuum Rated
  • Connector Type
    DB15 Female
  • Operating Temperature
    10 to 40°C
  • Thread Type
    M4 and M6