New High Dynamic, Hybrid Air Bearing XY Stage with Soft Isolation System

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Overview

The HybrYX single plane XY hybrid stages are the latest addition to our air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. HybrYX-HD with Soft Isolation System is well suited for semiconductor wafer processing systems, as well as being an excellent choice for use in large substrate inspection and processing tools. The Soft Isolation System option allows the system to operate at higher speed & acceleration (High Dynamic) without sacrificing stability at the point of interest or inducing vibrations into the floor.

Excellent price-to-performance value for demanding industrial OEM applications
Ideal for scanning applications requiring ultra-low velocity ripple & minimal dynamic following error
True single plane XY architecture with optional theta and Z-Tip-Tilt solutions
Reliable, long-life operation well suited for high duty cycle environments
Large (>1 meter) XY Travel range
Scanning velocities up to 2 m/sec and 5 g acceleration on Y Axis

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		Compare	Model	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Availability	Featured Item	Price		Brand
		New HYBRYX-HD Hybrid Air Bearing XY Stage System, High Dynamic, Soft Isolation System Contact Us	New HYBRYX-HD Hybrid Air Bearing XY Stage System, High Dynamic, Soft Isolation System	UNIVERSAL	0.0	1.0	0.0		0.0	Contact Us	New

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Specifications

Motorized Axes

XY
Travel Range

X: 500 mm
Y: 320 mm
Maximum Speed

X: 1500 mm/s
Y: 2000 mm/s
Maximum Acceleration

X: 1.5 g
Y: 5 g

Centered Load Capacity

5 kg
Pitch, Typical

< 15 µrad
Yaw, Typical

< 15 µrad
MTBF

>40,000 hours (25% load, 30% duty cycle)

Features

Soft Isolation System: Active motion compensation and vibration isolation

The patented Soft Isolation System is designed for applications such as optical lithography or wafer inspection that require fast movement from point-of-interest to point-of-interest, with minimal settle time while reducing vibration introduced to the production floor. The system includes 4 Soft Isolation modules, one for each corner of the granite base. The soft elastomer mounts isolate the granite from the frame and allow the granite to move in reaction to stage acceleration. One Soft Isolation module is equipped with “absolute encoders” in both X and Y to measure movement between the granite and the frame. The stage has an encoder in Y and two encoders in X (one for each end of the gantry). Using a Position Control Loop, the stage can actively compensate for movement by the granite and maintain a stable position at the “point-of-interest”. The Soft Isolation System dramatically reduces any stage acceleration vibration (VC-C) transmitted to the production floor. The system allows for high acceleration and throughput without inducing vibrations into the subfloor.

Innovative Architecture

HybrYX stages blend the cost-effectiveness of mechanical bearings with the precision of a single plane air bearing carriage to deliver a powerful combination of throughput, precision and value. During motion, a ceramic/aluminum carriage freely slides in X and Y on a precision lapped granite reference plane using a proprietary pressure-vacuum air bearing design. This XY carriage is pressure-pressure guided on the beam and guided along the Y-axis by a rigid and lightweight SiC ceramic beam. The beam is supported (and guided) at each end by recirculating ball bearing carriages resulting in a low-profile design that is extremely rigid, well-damped, and capable of quick & precise point-to-point moves and exceptional high-speed scanning performance. This design also provides exceptionally high Z stiffness/stability for critical applications.

Silicon Carbide Components

Comparable to the density of aluminum and granite, SiC has the added advantage of higher stiffness compared to any other material used in precision motion applications, including steel and aluminum. The thermal conductivity of SiC is 6 X lower than aluminum. While its thermal expansion coefficient is lower than granite. The benefits of using SiC are the ability to move and stop at higher accelerations coming from its light weight and high stiffness and better accuracy and repeatability due to less susceptibility to thermal changes. Another measurable benefit from SiC’s desirable characteristics is in position stability.

The HybrYX-HD Stage Applications

Wafer Inspection
Laser Annealing
PCB Patterning
Wafer Bump Inspection
Automated Optical Inspection
Array Checking
Array Repair
Color Filter Generation
Edge Isolation
Scribing
Fiducial and Barcode Generation
Wave Guide Direct Writing
Optical Calibration