Laser Micromachining Workstation, µFAB-L

Model: UFAB-L

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Overview

The µFAB-L laser Micromachining Workstation is a table-top easy to use micromachining tool for various applied materials research fields. This device employs high performance galvanometer scanners for fast laser writing and a XYZ stage assembly for sample positioning. The included software allows importing several types of CAD files and permits large areas microfabrication by stitching galvos and stages motion.

Technical Specs

Wavelength Range

350 to 1100 nm
Beam Diameter (1/e²)

5 mm
Attenuation Range

OD0 to OD4 (Computer Controlled)
Travel Range X, Y, Z

150 mm, 150 mm, 13 mm
Maximum Speed X, Y, Z

50 mm/s, 50 mm/s, 1 mm/s
Minimum Incremental Motion X, Y, Z

0.10 µm, 0.10 µm, 0.05 µm

Galvanometric Mirror Marking Speed

2 m/s
Galvanometric Mirror Repeatability

< 2 µrad
Angular Resolution

2.8 µrad for angle range of +/- 0.36 rad
Weight

86 kg
Dimensions

762 x 762 x 762 mm

Technical Specs

Wavelength Range

350 to 1100 nm
Beam Diameter (1/e²)

5 mm
Attenuation Range

OD0 to OD4 (Computer Controlled)
Travel Range X, Y, Z

150 mm, 150 mm, 13 mm
Maximum Speed X, Y, Z

50 mm/s, 50 mm/s, 1 mm/s
Minimum Incremental Motion X, Y, Z

0.10 µm, 0.10 µm, 0.05 µm

Galvanometric Mirror Marking Speed

2 m/s
Galvanometric Mirror Repeatability

< 2 µrad
Angular Resolution

2.8 µrad for angle range of +/- 0.36 rad
Weight

86 kg
Dimensions

762 x 762 x 762 mm

Laser Micromachining Workstation, µFAB-L

Product Comparison

Laser Micromachining Workstation, µFAB-L

Model: UFAB-L

Laser Micromachining Workstation, µFAB-L

Laser Micromachining Workstation, µFAB-L

Model: UFAB-L

Overview

Overview

Technical Specs

Technical Specs

Technical Specs

Model: UFAB-L