Spatial Filter, Compact, Five-Axis, XY θxθy 100TPI, Z 80TPI

Technical Specs

  • Type
    Five-Axis Spatial Filter
  • Axes of Travel
    XYZ θXθY
  • Travel Range X, Y, Z
    X, Y = +/-1.6 mm
    Z = +/-3.2 mm
  • Travel Range ΘX, ΘY, ΘZ
    θX, θY = +/-5°
  • Sensitivity
    X, Y = 0.75 µm
    Z = 1 µm
    θX, θY = 3 arc sec