Device Alignment Stage, Wide Five-Axis, Vacuum, 3 mm, 8°, 8-32 & 1/4-20

Technical Specs

  • Axes of Travel
    X, Y, Z, θx, θy
  • Mechanism
    Kinematic
  • Drive Type
    Hex-Key
  • Travel Range
    3 mm  
  • Angular Range
  • Load Capacity
    22 N  
  • Material
    Aluminum
  • Sensitivity
    Linear: 0.9 µm
    Angular: 18 µrad
  • Vacuum Compatibility
    10-6 Torr
  • Thread Type
    8-32 and 1/4-20
  • Weight
    1.23 lbs