Motorized Device Aligner, Wide, XYZθxθyθz, 3 mm, 4°, M6

The Model 8095 six-axis aligner offers XYZΘxΘyΘz Picomotor adjustment making it ideal for semiconductor-wafer alignment. It is offered with English or metric tapped holes.

These multi-axis kinematic alignment stages are equipped with Picomotor actuators which are ideal devices for fine-positioning and long-term stability. The Picomotor actuators have a less than 30 nm resolution with minimal backlash and maintain their position with no power applied. These features make the Picomotor actuators unique among motion-control devices and an ideal choice for typical set-and-hold applications.

Kinematic Device Alignment Stages combine the capabilities of multiple, stacked translation stages into a single stage with multiple actuators. These stages are designed to align a device or optic, such as an acousto-optic modulator, to a beam path, avoiding the added wobble of combining components for multi-axis positioning. These stages have all degrees of freedom needed to align one optical axis to another. The five-axis stages provide additional control of the focus and the six-axis stage provides roll. Each degree of freedom has one actuator for motion, such that two actuators provide translation when moved equal amounts, while one actuator's motion provides the tilt about the bisecting axis. Rotations of the mounting plate around its center, then, arise from turning two actuator screws in opposite directions.

Our multi-axis stages are designed for applications where precise positioning and high stability are required. Shown here is a typical application of aligning an optical modulator to a laser beam with our four-axis device alignment stage.