About Newport Contacts & Locations Legal Information Supplier Information
- Language Selector
Sorry, this product is no longer offered for sale.
High Energy Excimer Laser Mirror, 50.8 mm, 0°, 193 nm


High Energy Excimer Laser Mirror, 50.8 mm, 0°, 193 nm
Model: 20QM20EM.40
The 20QM20EM.40 is a 50.8-mm diameter, 6.35-mm thick High Energy Excimer Laser Mirror coated for 193 nm. Its reflectivity at this wavelength is greater than 99% for both s- and p-polarization, and it is optimized for 0° AOI.
Newport's High Energy Excimer Laser Mirrors feature ultra-hard dielectric coatings on UV Grade Fused Silica substrates to resist damage from high power lasers. The coating is highly durable and will withstand repeated cleaning.
Specifications
- Wavelength RegionUV
- Wavelength Range193 nm
- Mirror ShapeRound
- Diameter50.8 mm
- MaterialUV Grade Fused Silica
- Coating TypeLow Loss Dielectric
- Coating CodeEM.40
- ReflectivityRavg>98% @ 193 nm
- Surface Quality10-5 scratch-dig
- Surface Flatnessλ/10 at 632.8 nm
- Wedge≤3 arc min
- Clear Aperture≥central 80% of diameter
- Thickness9.65 mm
- Thickness Tolerance±0.5 mm
- Diameter Tolerance+0/-0.25 mm
- Chamfers0.38–1.14 mm face width
- Chamfers Angle Tolerance45° ±15°
- Cleaning
- Wavelength RegionUV
- Wavelength Range193 nm
- Mirror ShapeRound
- Diameter50.8 mm
- MaterialUV Grade Fused Silica
- Coating TypeLow Loss Dielectric
- Coating CodeEM.40
- ReflectivityRavg>98% @ 193 nm
- Surface Quality10-5 scratch-dig
- Surface Flatnessλ/10 at 632.8 nm
- Wedge≤3 arc min
- Clear Aperture≥central 80% of diameter
- Thickness9.65 mm
- Thickness Tolerance±0.5 mm
- Diameter Tolerance+0/-0.25 mm
- Chamfers0.38–1.14 mm face width
- Chamfers Angle Tolerance45° ±15°
- Cleaning
