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High Energy Excimer Laser Mirror, 50.8 mm, 0°, 193 nm

Specifications

  • Wavelength Region
    UV
  • Wavelength Range
    193 nm
  • Mirror Shape
    Round
  • Diameter
    50.8 mm  
  • Material
    UV Grade Fused Silica
  • Coating Type
    Low Loss Dielectric
  • Coating Code
    EM.40
  • Reflectivity
    Ravg>98% @ 193 nm
  • Surface Quality
    10-5 scratch-dig
  • Surface Flatness
    λ/10 at 632.8 nm
  • Wedge
    ≤3 arc min
  • Clear Aperture
    ≥central 80% of diameter
  • Thickness
    9.65 mm  
  • Thickness Tolerance
    ±0.5 mm
  • Diameter Tolerance
    +0/-0.25 mm
  • Chamfers
    0.38–1.14 mm face width
  • Chamfers Angle Tolerance
    45° ±15°
  • Cleaning