High-Energy Excimer Laser Mirrors

Designed for the most demanding UV applications, our high-energy excimer laser mirrors have low loss dielectric coatings to minimize scatter and maximize reflected energy.

High reflectivity dielectric coatings
High damage threshold
Optimized for 0° or 45° AOI
UV fused silica substrate for low thermal expansion and absorption

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Description	Compatibility	Wavelength Range	Angle of Incidence	Diameter	Thickness	Avail.	Price
10QM20EM.15Excimer Laser Mirror, High Energy, 25.4 mm Diameter, 45°, 248 nm	UNIVERSAL	248 nm	45°	25.4 mm	6.35 mm	FREE 2-day shipping on thousands of products on Newport.com Learn More	$440
10QM20EM.20Excimer Laser Mirror, High Energy, 25.4 mm Diameter, 0°, 308 nm	UNIVERSAL	308 nm	0°	25.4 mm	6.35 mm		$499
10QM20EM.25Excimer Laser Mirror, High Energy, 25.4 mm Diameter, 45°, 308 nm	UNIVERSAL	308 nm	45°	25.4 mm	6.35 mm	FREE 2-day shipping on thousands of products on Newport.com Learn More	$482
10QM20EM.35Excimer Laser Mirror, High Energy, 25.4 mm Diameter, 25.4 mm, 45°, 351-353 nm	UNIVERSAL	351-353 nm	45°	25.4 mm	6.35 mm		$462
20QM20EM.15High Energy Excimer Laser Mirror, 50.8 mm, 45°, 248 nm	UNIVERSAL	248 nm	45°	50.8 mm	9.65 mm	FREE 2-day shipping on thousands of products on Newport.com Learn More	$556
20QM20EM.25High Energy Excimer Laser Mirror, 50.8 mm, 45°, 308 nm	UNIVERSAL	308 nm	45°	50.8 mm	9.65 mm		$751
20QM20EM.35High Energy Excimer Laser Mirror, 50.8 mm, 45°, 351-353 nm	UNIVERSAL	351-353 nm	45°	50.8 mm	9.65 mm		$784

Specifications

Wavelength Range
248 nm, 308 nm, 351-353 nm
Mirror Shape
Round
Diameter
25.4 mm, 50.8 mm
Material
UV Grade Fused Silica
Surface Quality
10-5 scratch-dig
Surface Flatness
λ/10 at 632.8 nm
Wedge
≤3 arc min

Clear Aperture
≥central 80% of diameter
Thickness
6.35 mm, 9.65 mm
Thickness Tolerance
±0.5 mm
Diameter Tolerance
+0/-0.25 mm
Chamfers Angle Tolerance
45° ±15°
Cleaning
See How to Clean Optics

Features

0° Incidence Angle Coatings

We offer excimer mirrors coated for a 0° angle of incidence for KrF (248 nm), XeCl (308 nm), and XeF (351–353 nm) lasers. Reflectivity at 248, 308, and 351–353 nm is greater than 99%.

45° Incidence Angle Coatings

We offer excimer mirrors coated for a 45° angle of incidence for KrF (248 nm), XeCl (308 nm), and XeF (351–353 nm) lasers. Reflectivity at 248, 308, and 351–353 nm is greater than 99%.

UV Fused Silica Substrates

Fused Silica is synthetic amorphous silicon dioxide of extremely high purity. This non-crystalline, colorless silica glass combines a low content of inclusions with high refractive index homogeneity, a very low thermal expansion coefficient, and excellent transmittance in the wavelength regime from UV to NIR. As a result, these mirrors will perform better with temperature fluctuations and is ideal for high-energy laser applications due to its high energy damage threshold. For more information, please see our Optical Materials technical note.