MKS Precision Motion Control Solutions

MKS gantries are precision motion systems used over large areas for a wide variety of applications, such as pick-and-place, 3D printing, laser machining (additive and ablation), patterning and welding. These gantry systems are found in photonics, optics, solar and semiconductor industries. Gantries are built from standard products or are customized to specific customer needs. Gantries provide motion in either 2 axis (XY) or 3 axis (XYZ). Rotation stages may be added for the adjustment of the sample or the tool/sensor.

There are many advantages to using gantry systems, foremost of which are:

  • Larger work area capacity
  • Better distribution of the load
  • Higher work area to footprint ratio
  • Better straightness/flatness compared to single axis stages
  • Compatible with automated load/unload of samples

 

MKS gantry systems for most applications can be constructed with a choice of standard linear stages, from the basic DC motor driven ballscrew IMS or ILS stages to the high performance, long travel, linear motor driven industrial stages like the IMS-LM and IDL family. Ultra-precision gantries can be built from the XM family of stages. On the other hand, customized gantries utilizing air bearings or CeraMech base technologies are available for applications with specific requirements around high stability, high dynamic and accurate performance. Our team of precision motion experts can build a custom gantry system that will fulfill your exact needs.

To further enhance the performance of MKS gantries, a number of features can be added like yaw correction, error mapping, etc. There are built in routines in the XPS controller, specifically for gantries. We also work with your team to characterize the gantry. This will include the usual accuracy, repeatability tests per axis. Other tests may be related to flatness or stability, depending on the demands of the application. Below are examples of precision gantries and their standard linear stages. Contact our Applications Engineering team for your precision gantry needs.

MKS Gantries

Pick-and-place system with IMS-LM (X,Y), MTN (Z), RV (Rz), BG (Rx,Ry)
Pick-and-place test system including IMS-LM (X), IMS-LM (Y), IMSCC (Z), vibration isolation table
 
Wafer inspection application using FLIR camera, IDL225-LM (X), IMS-LM (Y), IMSCC(Z), solid Granite base
 
Photomask inspection system with XML (X), XMS (Y), Z/Tip/Tilt
 
 
 
 
LCD panel inspection using IMS-LM (X,Y), GTS (V), workstation
Wafer inspection solution using XM (X,Y), Tip/Tilt/Z
 
Laser Welding system featuring IMS-LM(X,Y), IMS-CC(Z)