Vacuum Compatible Linear Stages

Vacuum Linear Stages

Newport vacuum compatible linear translation stages offer excellent motion performance. Each linear stage is built, treated and tested under vacuum to 10-6 hPa (7.5*10-7 Torr). With a wide vacuum compatible linear stage selection from nanopositioners to micropositioners, Newport vacuum compatible linear stages can address the translation needs of the most demanding vacuum motion applications.

Newport has the capability to prepare stages and motion systems not listed here for application in vacuum environments. To discuss your application specific motion requirements, contact us online or call 877-835-9620.

Vacuum Compatible Linear Stages

Series Travel Range
(mm)
Minimum Incremental Motion
(µm)
Normal Load Capacity
(N)
Maximum Speed
(mm/s)
MC-MTN300PPV6_woBP MTN Series Vacuum Stages
MTN100PPV6
MTN200PPV6
MTN300PPV6
100-300 0.4 1000 20
MC-UTS150CC_1-Silver UTS Series Vacuum Linear Stages
UTS50PPV6
UTS100PPV6
UTS150PPV6
50-150 0.3 100 20-40
MC-MFA_1-Silver MFA Miniature Vacuum Linear Stages
MFA-CCV6
25 0.1 50 1.25
AGLS25V6 Agilis Series Vacuum Linear Stages
AG-LS25V6
AG-LS25-27V6
12, 27 .05 3 >0.5
MC-NP Series-Silver NPX Vacuum Linear Stages
NPX200SGV6
NPXY100SGV6
NPXYZ100V6
NPXYZ100SGV6
.100-.200 0.0002-0.008 10-100 See Specifications