Ultra High Vacuum Isolation Valves

Overview

The ultra-High vacuum valve is lightweight and has a compact profile, enabling it to fit easily into vacuum systems where space is tight. The UHV Valve has a copper bonnet seal and an elastomer nosepiece seal which limits outgassing and permeation allowing a lower base system pressure. We have optimized the welded stainless steel bellows stroke length to ensure a long cycle life while maintaining high conductance.

Please see UHV Ultra-high Vacuum Valves on mks.com for additional configurations.

Metal bonnet seal limits outgassing and permeation for a lower base pressure
High purity, corrosion resistant, 304 stainless steel body
Surface finish options of electropolish or bead blast
Spring-to-close, air-to-open pneumatic valve

Products

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Compare	Model	Port Size	Configuration	Valve Actuation	Availability	Price	Brand
UHV-25-ACC-ELVN UHV Isolation Valve, NW25, CF 2.75 in., Angle Ports, Viton/Copper, Pneumatic $770.00 In Stock	UHV-25-ACC-ELVN UHV Isolation Valve, NW25, CF 2.75 in., Angle Ports, Viton/Copper, Pneumatic	NW25	Angled Ports	Pneumatic	In Stock	$770.00	MKS Instruments
UHV-40-ACC-ELVN UHV Isolation Valve, NW40, CF 2.75 in., Angle Ports, Viton/Copper, Pneumatic $824.00 In Stock	UHV-40-ACC-ELVN UHV Isolation Valve, NW40, CF 2.75 in., Angle Ports, Viton/Copper, Pneumatic	NW40	Angled Ports	Pneumatic	In Stock	$824.00	MKS Instruments
UHV-40-ACC-EMVM UHV Isolation Valve, NW40, CF 2.75 in., Angle Ports, Viton/Copper, Manual $643.00 In Stock	UHV-40-ACC-EMVM UHV Isolation Valve, NW40, CF 2.75 in., Angle Ports, Viton/Copper, Manual	NW40	Angled Ports	Manual Knob	In Stock	$643.00	MKS Instruments
UHV-40-ICC-ELVN UHV Isolation Valve, NW40, CF 2.75 in., Inline Ports, Viton/Copper, Pneumatic $915.00 In Stock	UHV-40-ICC-ELVN UHV Isolation Valve, NW40, CF 2.75 in., Inline Ports, Viton/Copper, Pneumatic	NW40	Offset Inline Ports	Pneumatic	In Stock	$915.00	MKS Instruments