Air Bearing Stages for Inspection and Metrology

HybrYX stages blend the cost-effectiveness of mechanical bearings with the precision of a single plane air bearing carriage to deliver a powerful combination of throughput, precision and value.
Showing 2 products in 2 families
HybrYX G5 Large Substrate Positioning Stage
1 Products
HybrYXTM XY Hybrid Air Bearing Stage
1 Products